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Installation Report
DVIA-M Series
11-10-2023

POSCO FUTURE M GeminiSEM 560 DVIA-MB1000 (230704R3) Installation Report

DVIA-M Series
Installation Report
POSCO
ZEISS
GeminiSEM
DVIA-MB1000
230704R3
SEM
세종시
음극재

Contents

Prepared for

POSCO FUTURE M Co., Ltd.

Engineer

Sangjae Lee, Jongwon Park

Tuning date

23.11.09

Report written date

23.11.10

Date of business trip

17.12.27~17.12.29

Overview

The DVIA-MB1000 active vibration isolation platform is appropriately installed and functioning as intended.

System Information

Model: DVIA-MB1000

Serial Number: 230704R3

Engineer

Sangjae Lee, Jongwon Park from DAEIL SYSTEMS

Tuning Date

November 09, 2023

Location

POSCO FUTURE M 음극재 2공장 1층 SEM룸, 세종시

Equipment

GeminiSEM 560

Summary of Vibration Results

Measurement PointZ-axis (Vertical) 1–10 HzZ-axis (Vertical) 12.5–80 HzX-axis (Left to Right) 1–10 HzX-axis (Left to Right) 12.5–80 HzY-axis (Front to Back) 1–10 HzY-axis (Front to Back) 12.5–80 Hz
FloorEGEGFG
ActiveGGGGGG

Data and Image

Z-axis (Vertical) Floor VC curves

Z-axis (Vertical) Active VC curves

X-axis (Left to Right) Floor VC curves

X-axis (Left to Right) Active VC curves

Y-axis (Front to Back) Floor VC curves

Y-axis (Front to Back) Active VC curves

Equipment Picture

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date11-10-2023
Tags
DVIA-M Series
Installation Report
POSCO
ZEISS
GeminiSEM
DVIA-MB1000
230704R3
SEM
세종시
음극재

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