Installation Report

DVIA-M Series

05-08-2020

YIMO ZEISS Gemini Sigma 300 DVIA-MB1000 Installation Report (MB1000 P155, 2020-05-08)

DVIA-M Series

Installation Report

YIMO

ZEISS

Gemini Sigma 300

DVIA-MB1000

DVIA-ML1000

SEM

Equipment picture

Target equipment

ZEISS - Gemini Sigma 300

Place of installation

2 FLOOR

Remark

Good Performance

END USER

Operator

Choi, Hyoung Mun

Date of setup

20.05.08

Date of reporting

20.05.08

Date of business trip

17.12.27~17.12.29

Overview

After Active mounting, measure the vibration environment to check that there is no problem in using the equipment.

Measurement date: 2020.05.08 (FRI),

Operator: Daeil System, Manager Choi, Hyoung Mun

Place of measurement : N/A

Equipment Model: ZEISS - Gemini

Measurement conditions and results

Summary of measurement results

Test Condition	VC-Class
	Z	X	Y
Floor
Above Active

Good omnidirectional performance.

MB1000 internal program performance measurement result

Z axis

X axis

Y axis

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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