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Installation Report
DVIA-M Series
11-30-2023

Ohio State University Nanotech West Lab Raith EPBG 5150 DVIA-MB3000 VEC (221130R3) Installation Report — 2023.11.30

DVIA-M Series
Installation Report
Ohio State University
Raith
EPBG 5150
VEC
DVIA-MB3000
221130R3

Contents

Prepared for

Ohio State University

Prepared by

Engineer: Youngha Lee

Tuning date: 23.11.30

Report written date: 23.12.19

Date of business trip : 17.12.27~17.12.29

Overview

The DVIA-MB3000 active vibration isolation platform is appropriately installed and functioning as intended.

System Information

Model: DVIA-MB3000 - 1800 x 1300 mm

Serial Number: 221130R3

Engineer

Youngha Lee from DAEIL SYSTEMS

Tuning Date

December 19, 2023

Location

Nanotech West Lab 1381 Kinnear Road Columbus, OH 43212

Equipment

Raith EPBG 5150

Data and Image

8.1 UI Program Transmissibility

Z-axis (Vertical)

X-axis (Left to Right)

Y-axis (Front to Back)

VEC Measurement

Z-axis (Vertical) Floor VC Curve

Z-axis (Vertical) Active VC Curve

Z-axis (Vertical) Transmissibility

X-axis (Left to Right) Floor Vibration

X-axis (Left to Right) Active Vibration

X-axis (Left to Right) High Frequency Vibration Transmissibility

Y-axis (Front to Back) Floor Vibration

Y-axis (Front to Back) MB3000 Vibration

Y-axis (Front to Back) High Frequency Vibration Transmissibility

Z-axis (Vertical) Transmissibility

X-axis (Left to Right) Transmissibility

Y-axis (Front to Back) Transmissibility

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date11-30-2023
Tags
DVIA-M Series
Installation Report
Ohio State University
Raith
EPBG 5150
VEC
DVIA-MB3000
221130R3

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