Installation Report
DVIA-M Series
11-29-2023
RAITH EBPG5150 E-Beam Lithography System DVIA-MB3000 Installation Report
DVIA-M Series
Installation Report
RAITH
Nanotech West Lab 1381 Kinnear Road Columbus, OH 43212
Contents
Summary Results
Below is a summary of the results:
MB3000 ON PASSED the Vibration specifications
This report details the installation of the Vibration Isolation MB3000 for the Raith EPBG5150 at Clean Room, Nanotech West Lab, 1381 Kinnear Road, Columbus, OH 43212. Ohio State University hired VEC to install the MB3000 and provide a report of the completed work.
Product Details
| Part Delivered | Serial Number | Software |
|---|---|---|
| MB3000 | 221130R3 | Site-Specific Tune |
Summary of Work
We installed the system by
- Positioning the modular platform under the microscope
- Leveling the modular platform to within .5mm
We tested the system by
- Creating and uploading a site-specific tune
- Collecting vibration data to verify the performance
We left the system
- In position and on
- With “Auto Active” enabled
Installer's Notes
The airline must be moved from nitrogen to compressed air for long-term use.
“Auto Active” has been enabled for this unit, so nothing needs to be done to the system after
power is restored in the event of power loss.
Procedures
Vibration
VEC conducted vibration measurements in three directions. Acceleration measurements were taken at a bandwidth of Hz with units of um/s. The acceleration spectra with Hz bandwidths were recorded.
Setup
| Vibration | |
|---|---|
| Bandwidth | Hz |
| Duration | seconds |
| Engineering Units | um/s |
Specifications
VEC used the following specifications for the project.
Specification Summary
| Tool | Specification |
|---|---|
| Raith EPBG515 | Vibration All Directions 9 um/s 1Hz - 6Hz 9-20 um/s 6Hz - 30Hz 20-10 um/s 30Hz - 80Hz 10-100 um/s 80Hz - 800Hz |
Detailed Specifications
Figure 1: Detailed Specification
Results
Summary Results
Below is a summary of the results:
MB3000 ON PASSED the Vibration specifications
Detailed Results
| Type | Position | Direction | Specification | Measurement | Result |
|---|---|---|---|---|---|
| Vibration | Floor | Front-Back | 9 um/s 1Hz - 6Hz | 2 um/s @ 4Hz | ✓ PASS |
| 9-20 um/s 6Hz - 30Hz | 7 um/s @ 18Hz | ✓ PASS | |||
| 20-10 um/s 30Hz - 80Hz | 1 um/s @ 58Hz | ✓ PASS | |||
| 10-100 um/s 80Hz - 800Hz | ✓ PASS | ||||
| Left-Right | 9 um/s 1Hz - 6Hz | 3 um/s @ 6Hz | ✓ PASS | ||
| 9-20 um/s 6Hz - 30Hz | 5 um/s @ 6Hz | ✓ PASS | |||
| 20-10 um/s 30Hz - 80Hz | 2 um/s @ 58Hz | ✓ PASS | |||
| 10-100 um/s 80Hz - 800Hz | ✓ PASS | ||||
| Vertical | 9 um/s 1Hz - 6Hz | 4 um/s @ 6Hz | ✓ PASS | ||
| 9-20 um/s 6Hz - 30Hz | 7 um/s @ 18Hz | ✓ PASS | |||
| 20-10 um/s 30Hz - 80Hz | 7 um/s @ 58Hz | ✓ PASS | |||
| 10-100 um/s 80Hz - 800Hz | ✓ PASS | ||||
| Vertical (Walking) | 9 um/s 1Hz - 6Hz | 22 um/s @ 2Hz | ✗ FAIL | ||
| 9-20 um/s 6Hz - 30Hz | 29 um/s @ 9Hz | ✗ FAIL | |||
| 20-10 um/s 30Hz - 80Hz | 8 um/s @ 58Hz | ✓ PASS | |||
| 10-100 um/s 80Hz - 800Hz | ✓ PASS | ||||
| MB3000 | Front-Back | 9 um/s 1Hz - 6Hz | 0.717 um/s @ 5Hz | ✓ PASS | |
| 9-20 um/s 6Hz - 30Hz | 0.276 um/s @ 25Hz | ✓ PASS | |||
| 20-10 um/s 30Hz - 80Hz | 0.804 um/s @ 45Hz | ✓ PASS | |||
| 10-100 um/s 80Hz - 800Hz | ✓ PASS | ||||
| Left-Right | 9 um/s 1Hz - 6Hz | 0.648 um/s @ 5Hz | ✓ PASS | ||
| 9-20 um/s 6Hz - 30Hz | 0.390 um/s @ 23Hz | ✓ PASS | |||
| 20-10 um/s 30Hz - 80Hz | 0.742 um/s @ 45Hz | ✓ PASS | |||
| 10-100 um/s 80Hz - 800Hz | ✓ PASS | ||||
| Vertical | 9 um/s 1Hz - 6Hz | 0.333 um/s @ 6Hz | ✓ PASS | ||
| 9-20 um/s 6Hz - 30Hz | 0.602 um/s @ 17Hz | ✓ PASS | |||
| 20-10 um/s 30Hz - 80Hz | 2 um/s @ 45Hz | ✓ PASS | |||
| 10-100 um/s 80Hz - 800Hz | ✓ PASS | ||||
| Vertical (Walking) | 9 um/s 1Hz - 6Hz | 2 um/s @ 2Hz | ✓ PASS | ||
| 9-20 um/s 6Hz - 30Hz | 0.966 um/s @ 9Hz | ✓ PASS | |||
| 20-10 um/s 30Hz - 80Hz | 3 um/s @ 45Hz | ✓ PASS | |||
| 10-100 um/s 80Hz - 800Hz | ✓ PASS |
Data
Figure 2: Floor Vibration Front-Back
Figure 3: MB3000 Vibration Front-Back
Figure 4: High Frequency Vibration Front-Back
Figure 5: Transmissibility Front-Back
Figure 6: Floor Vibration Left-Right
Figure 7: MB3000 Vibration Left-Right
Figure 8: High Frequency Vibration Left-Right
Figure 9: Transmissibility Left-Right
Figure 10: Floor Vibration Vertical
Figure 11: MB3000 Vibration Vertical
Figure 12: High Frequency Vibration Vertical
Figure 13: Transmissibility Vertical
Figure 14: Floor Vibration Vertical (Walking)
Figure 15: MB3000 Vibration Vertical (Walking)
Figure 16: Transmissibility Vertical (Walking)
Reference
Generic Vibration Criteria
Notes:
1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.
2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.
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Case Study Information
Category
Installation Report
SeriesDVIA-M Series
Date11-29-2023
Tags
DVIA-M Series
Installation Report
RAITH
