RAITH PIONEER Two EBL and SEM DVIA-MB1000 Installation Report
1. Measurement Details
Measurement Date
April 18, 2020
Measurement Devices
1. LAN-XI Data Acquisition Hardware
– Brüel & Kjæ r 3050-B-040
2. Data Analysis Software
– Brüel & Kjæ r PULSE LAB SHOP 14
3. Sensors
– PCB Accelerometer
– Model: 393B05
Measurement Location
Ground Floor
2. Equipment Information
Manufacturer
RAITH
Model
PIONEER Two Electron Beam Lithography & SEM
Floor Vibration Specification
The velocity of floor vibrations measured in a 1/3-octave RMS amplitude spectrum has
to be less than 1.0 μm/sec for frequencies between the 1.6-Hz band and the 10-Hz band
(including them). For frequencies above the 10-Hz band the maximum velocity should
not exceed 2.0 μm/sec. (A similar result can be achieved, if the floor vibrations are less
than the specifications defined by the standard NIST-A.)
3. Vibration Isolation System Information
Model: DVIA-MB1000
| Platform Dimensions | 1140 x 910 x 224 mm | |
|---|---|---|
| Load Capacity | 500 - 1700 kg | |
| Actuator | Electromagnetic Actuator | |
| Maximum Actuator Force | Vertical: 40N, Horizontal: 20 N | |
| Degrees of Freedom | 6 degrees | |
| Active Isolation Range | 0.5 - 100 Hz | |
| Vibration Isolation at 2 Hz | ≥90% | |
| Vibration Isolation at 10 Hz | ≥99% | |
| Input Voltage (V) | AC100 - 240V / 50 - 60 Hz / 1A | |
| Power Consumption (W) | Maximum 110W, <50 W in normal operation | |
| Operating Range | Temperature (°C) | 5 - 50 °C |
| Humidity (%) | 20 - 90% | |
| Required Air Pressure | ≥ 0.5 MPa (5 bar) | |
4. Installation Photos
5. Summary
Vibration Criterion Curves
---
| Frequency Range | 1-10 Hz | 10 - 80 Hz | |||
|---|---|---|---|---|---|
| Measurement Direction | Z axis (Vertical) | X axis (Left to Right) | Y axis (Front to Back) | Z axis (Vertical) | X axis (Left to Right) |
| Floor | VC-B (✗ Fail) | VC-D (✗ Fail) | VC-D (✗ Fail) | VC-C (✗ Fail) | VC-E (✗ Fail) |
| On Active Vibration Isolation System | VC-G (✓ Pass) | VC-G (✓ Pass) | VC-E (✓ Pass) | VC-E (✓ Pass) | VC-G (✓ Pass) |
The floor vibration specification of the RAITH Pioneer Two is extremely challenging, the measured floor vibrations did not meet the vibration specification. DAEIL SYSTEMS’s active vibration isolation system reduced the floor vibration in Z, X and Y axis, achieved to meet the vibration specification.
6. Results
Z-axis (Vertical)
AVI = Active Vibration Isolation
The measured vertical floor vibration exceeded the allowable floor vibration values from 1 to 80 Hz.
After the installation of DAEIL SYSTEMS’s active vibration isolation system, the floor vibrations were reduced to meet the floor vibration specification.
X-axis (Left to Right)
AVI = Active Vibration Isolation
The measured floor vibration in X axis below 10 Hz exceeded the allowable floor vibration. DAEIL SYSTEMS’s active vibration isolation system reduced the floor vibration from VC-E to VC-G in 1 – 80 Hz, meeting the floor vibration specification.
Y-axis (Front to Back)
AVI = Active Vibration Isolation
The low frequency floor vibration at 1.6 Hz, 5 Hz, 6.3 Hz exceed the allowable floor vibration values.
DAEIL SYSTEMS’s active vibration isolation system reduced these vibrations, achieved to meet the floor vibration specification
7. Reference
Generic Vibration Criteria
| Criterion Curve | Description | Amplitude µm/s (µin/s) | Detail Size µm |
|---|---|---|---|
| Workshop (ISO) | Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas. | 800 (32,000) | N/A |
| Office (ISO) | Perceptible vibration. Appropriate to offices and non-sensitive areas. | 400 (16,000) | N/A |
| Residential Area (ISO) | Barely perceptible vibration. Appropriate to sleep areas in most instances. | 200 (8,000) | 75 |
| Operating Theatre (ISO) | Vibration not perceptible. Suitable for surgical suites, microscopes to 100x. | 100 (4,000) | 25 |
| VC-A | Adequate for optical microscopes to 400x, microbalances, optical balances. | 50 (2,000) | 8 |
| VC-B | Appropriate for inspection and lithography equipment to 3μm line widths. | 25 (1,000) | 3 |
| VC-C | Appropriate for optical microscopes to 1000x, lithography equipment to 1μm. | 12.5 (500) | 1 - 3 |
| VC-D | Suitable for demanding equipment including electron microscopes (SEMs/TEMs). | 6.25 (250) | 0.1 - 0.3 |
| VC-E | For the most demanding systems including E-Beam lithography at nanometer scales. | 3.12 (125) | < 0.1 |
| VC-F | For extremely quiet research spaces. Not recommended as design criterion. | 1.56 (62.5) | N/A |
| VC-G | For extremely quiet research spaces. Not recommended as design criterion. | 0.78 (31.25) | N/A |
Notes:
1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.
2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.
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