Vibration Isolation Case Studies

Tier-1 Semiconductor Suwon site DVIA-P2200 (serial 250115R1-2) installation report: tuning and vibration measurement at the B5 1F environmental chamber. Published figures: vertical, left-to-right, and front-to-back VC curves, autospectra, and transmissibility. Reference uses the standard Generic Vibration Criteria markdown table only.

DVIA-MB3000 (serial 170515R4) on-site tuning and vibration worksheet dated 2025.07.08 at Tier-1 Semiconductor Cheonan campus (equipment Turned on/IDLE): VC curves, autospectra, and transmissibility for floor vs DVIA-MB3000 platform, measurement summary table (vertical floor FAIL / platform PASS at reported frequencies), equipment vibration specification excerpt (VC-C), and Reference as a markdown Generic Vibration Criteria table (no separate reference figure). Engineer Seo Jong-hwa (DAEIL SYSTEMS); report written 2025.07.10.

DVIA-ULF1000 (S/N 250523R3) tuning and vibration measurement at the Wadebro 1F cleanroom for a ZEISS Sigma 360 FE-SEM (End User FS2). B&K PULSE 22 acquisition; VC curves and autospectra by axis with equipment installed and turned off. Published plots exclude the Word cover banner and Generic Vibration Criteria figure (reference is the standard markdown VC table).

July 2025 installation report at Seoul Asan Hospital 4th floor: DVIA-T56 (serial 190329R1-3) beneath a Tomocube HT-2H fluorescence holographic tomography microscope. Published VC, autospectrum, and transmissibility plots by axis; Reference uses the standard VC criteria table.

Report — SN 220121R3, 4th tuning, ZEISS Sigma 360 VP FE-SEM at the ZEISS Innovation Center (Shanghai, China). Internal program Transmissibility (Vertical, Left to Right, Front to Back) and equipment photo.

DVIA-M1000 installation report (serial 230105R1-1) for ZEISS MultiSEM at Tsinghua University, Beijing. Overview states the platform is appropriately installed and functioning as intended. End user and location are Tsinghua University and Beijing; equipment is installed/IDLE. Tuning request is shown as a UI capture; Data and Image publishes axis transmissibility plots and an equipment photograph. Reference uses the standard Generic Vibration Criteria markdown table only (no separate reference graphic).