Vibration Isolation Case Studies

DVIA-MB1000 installation report (serial 231128R4) at the Tier-1 Semiconductor Yongin campus: Zeiss FE-SEM Gemini 2; VC / narrow-band / transmissibility plots by axis; equipment photo; Reference as the standard Generic Vibration Criteria markdown table.

DVIA-MB1000 (serial 170619R2) tuning and vibration measurements for a SERON Technology self-developed FE-SEM at World Vision room 506, with the equipment in Operation after mounting on the platform. The workbook notes a rotary pump running at the rear of the equipment during the session. Publishes VC curves, narrow-band, and transmissibility plots for vertical, left-to-right, and front-to-back axes, an on-site installation photograph, and the standard VC reference as a markdown table (no separate criteria figure).

DVIA-ML3000 (250103R2-1) installation report at POSTECH — Raith Voyager electron-beam lithography. Equipment specification diagram, VC / Autospectrum / Transmissibility by axis, equipment photo, and standard Reference vibration criteria as a markdown table.

DVIA-MO1000 installation report at Tomocube's Demo room (serial 240507R4-1). Tuning and vibration measurements were performed in equipment turned-off condition; summary table and axis plots are included with equipment photo and Generic Vibration Criteria reference table.

DVIA-MO1000 installation report at Tomocube's cleanroom (serial 240507R4-2). Equipment Turned off measurements with VC specification VC-G, summary table, axis plots, and equipment photos are published.

DVIA-M1000 installation report — ZEISS SEM model EVO 10 (serial 250421R7). Overview states the platform is appropriately installed and functioning as intended. End user, prepared for, and location N/A on the form. Equipment condition The equipment is installed/Turned off; tuning request N/A. UI-program vertical, left-to-right, and front-to-back transmissibility plots and on-site equipment photo.