Vibration Isolation Case Studies

DVIA-M1000 installation report — ZEISS FE-SEM model Sigma 360 (serial 250318R5) for Jiaxing Xindong Technology in Jiaxing. Overview states the platform is appropriately installed and functioning as intended. Vibration specification N/A on the form; equipment condition The equipment is installed/IDLE. Published figures: tuning-request UI capture, vertical / left-to-right / front-to-back transmissibility plots, on-site equipment photo; Reference section uses the standard VC criterion table.

DVIA-M1000 installation report — Unisoku STM (serial 250331R2), tuning June 04, 2025 (1st trial). Overview states the platform is appropriately installed and functioning as intended. Prepared for and End User are N/A on the form; Location N/A. Equipment Condition — The equipment is installed/Turned on; equipment model field N/A. No vibration specification paragraph and no measurement summary table on the published form; UI-program transmissibility (vertical, left-to-right, front-to-back) and one on-site equipment photo.

DVIA-M1000 installation report — Thermo Fisher FIB-SEM Helios 5 CX (serial 250417R2). Overview states the platform is appropriately installed and functioning as intended. Location Hangzhou; End User N/A on the form. Vibration specification N/A. Equipment condition The equipment is installed/Turned off. Tuning Request UI capture, vertical / left-to-right / front-to-back transmissibility plots, on-site equipment photo; Reference uses the standard VC criterion table.

DVIA-MB1000 installation report (serial 231128R4) at the Tier-1 Semiconductor Yongin campus: Zeiss FE-SEM Gemini 2; VC / narrow-band / transmissibility plots by axis; equipment photo; Reference as the standard Generic Vibration Criteria markdown table.

DVIA-MB1000 (serial 170619R2) tuning and vibration measurements for a SERON Technology self-developed FE-SEM at World Vision room 506, with the equipment in Operation after mounting on the platform. The workbook notes a rotary pump running at the rear of the equipment during the session. Publishes VC curves, narrow-band, and transmissibility plots for vertical, left-to-right, and front-to-back axes, an on-site installation photograph, and the standard VC reference as a markdown table (no separate criteria figure).

DVIA-ML3000 (250103R2-1) installation report at POSTECH — Raith Voyager electron-beam lithography. Equipment specification diagram, VC / Autospectrum / Transmissibility by axis, equipment photo, and standard Reference vibration criteria as a markdown table.