SERON Technology self-developed FE-SEM DVIA-MB1000 (170619R2) installation report — 2025.05.26
Contents
Overview
Tuning and vibration measurements were performed on the DVIA-MB1000 installed in World Vision room 506.
Tuning and vibration measurements were carried out because vibration was observed in images from SERON Technology’s self-developed FE-SEM.
A rotary pump at the rear of the equipment was running; this may affect tuning and vibration measurements.
After the equipment was settled on the platform, vibration measurements and tuning were conducted with the equipment in Operation.
Data are presented as VC curves, and reference materials on vibration levels are provided.
Vibration Isolation System Information
Model: DVIA-MB1000
Serial Number: 170619R2
Engineer
DAEIL SYSTEMS field engineer Chaewon Lee
Tuning Date
May 21, 2025
Report written date
25.05.26
End User
SERON Technology
Installation Site
World Vision room 506
Equipment
Manufacturer: SERON Technology
Equipment: FE-SEM
Model: Self-made
Equipment Condition
Equipment settled on the isolation platform and Operation
Number of Tuning Trials
3회차
Measurement Equipment
10.1) PULSE 22
Hardware: B&K Front End Type 3050-A-040
Software: B&K Pulse Labshop 22 Version
10.2) Accelerometer
PCB Accelerometer
Model: 393B05
Measurement Setup
Bandwidth: 200 Hz
Lines: 3200
Averaging: Spectrum Averaging
Engineering Units: m/s
Window: Hanning
Overlap: 90
Conclusion
Vertical: At 63 Hz, vibration attenuates from VC-B to VC-G.
Left to Right: At 2 Hz, vibration attenuates from VC-D to VC-F.
Front to Back: At 2 Hz, vibration attenuates from VC-D to VC-G.
Measurement Summary
| Measurement site | Equipment state | Direction | Floor | DVIA-MB1000 |
|---|---|---|---|---|
| 위치: 월드비전 506호 1. 바닥 2. DVIA-MB1000 | 설치완료/Operation | Vertical | VC-B@ 63 Hz | VC-G@ 63 Hz |
| Left to Right | VC-D@ 2 Hz | VC-F@ 2 Hz | ||
| Front to Back | VC-D@ 2 Hz | VC-G@ 2 Hz |
Data and Image
Vertical VC Curves
Vertical Narrow Band
Vertical Transmissibility
Left to Right VC Curves
Left to Right Narrow Band
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Narrow Band
Front to Back Transmissibility
Installation photograph
Reference
Generic Vibration Criteria
Notes:
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
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