Jinhae Armed Forces Financial Management Command ZEISS FE-SEM EVO10 DVIA-MB1000 (230704R4) Installation Report
Contents
Prepared for
진해 국군재정관리단
Overview
DVIA-MB1000 installation tuning and vibration measurements were performed for the Armed Forces Financial Management Command, Jinhae. Measurements were taken with the equipment turned off. DVIA-MB1000 was connected to a notebook PC for tuning through the UI program, and inspection used vibration measurements with PULSE 14 equipment. Measurement data were plotted on VC curve graphs.
Vibration Isolation System Information
Model: DVIA-MB1000
Serial Number: 230704R4
Engineer
Chaewon Lee, Youngha Lee from DAEIL SYSTEMS
Tuning Date
February 21, 2024
Report written date
23.02.26
Number of Tuning Trial
1st tuning
Location
진해 국군재정관리단, 진해
Equipment
ZEISS FESEM EVO10
Equipment Condition
Equipment is installed/ Turned off
Equipment Vibration Spec
30 Hz 이하 6μm/s
30 Hz 이상 12μm/s
EVO10 specification VC curve
Measurement Device
10.1) PULSE 14
Hardware: Bruel & Kjaer Type 3050-B-040
Software: LapShop Application (PULSE Lapshop Ver14)
10.2) Measurement Setting
Bandwidth: 0 - 200Hz
Lines: 800
Window: Hanning
Averaging: FFT Spectrum Averaging
Engineering Units:
10.3) Accelerometer
PCB Accelerometer
Model: 393B05
10.4) Measurement Method
상부(Top plate), 하부(Floor)에 진동 측정용 가속도 센서를 부착합니다.
Vertical, Left to Right, Front to Back 방향으로 진동을 측정합니다.
Conclusion
Vertical, Left to Right, and Front to Back directions — ground vibration was attenuated to VC-G for all frequency bands except 1 Hz. In all directions, DVIA-MB1000 vibration is below the allowable vibration specification for ZEISS EVO10.
Summary of Vibration Results
| Measurement Point | VC curves | |
|---|---|---|
| Vertical 1-30 Hz | Vertical 30-80 Hz | |
| Floor | F(✓ PASS) | G(✓ PASS) |
| MB1000 | F(✓ PASS) | G(✓ PASS) |
| EVO10 Spec | D | C |
Data and Image
Vertical Transmissibility
Vertical VC curve
Left to Right Transmissibility
Left to Right VC curve
Front to Back Transmissibility
Front to Back VC curve
Reference
Generic Vibration Criteria
Notes:
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
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