Tier-1 Semiconductor Zeiss Gemini 2 FE-SEM DVIA-MB1000 (231128R4) Installation Report
Contents
Overview
Tuning and vibration measurement were performed for the DVIA-MB1000 installed at the Tier-1 Semiconductor Yongin campus.
Vibration measurement and tuning were conducted with the equipment Turned on and IDLE.
Data are presented as VC curves, and reference material on vibration levels is provided.
Vibration Isolation System Information
Model: DVIA-MB1000
Serial Number: 231128R4
Engineer
DAEIL SYSTEMS field engineer 서종화
Tuning Date
May 29, 2025
Report written date
25.05.29
End User
Tier-1 Semiconductor
Installation Site
Tier-1 Semiconductor Yongin campus R&D building
Equipment
Manufacturer: Zeiss
Equipment: FE-SEM
Model: Gemini 2
Vibration specification
N/A
Equipment Condition
장비 Turned on 및 IDLE
Number of Tuning Trial
1st
Measurement Device
11.1) Data Physics DAQ
-Hardware: QUATTRO, Serial Number: 22436
-Software: SignalCalc ACE
11.2) Accelerometer
PCB Accelerometer
Model: 393B05
Measurement Set-up
Bandwidth: 200 Hz
Lines: 3200
Averaging: Spectrum Averaging
Engineering Units: m/s
Window: Hanning
Overlap: 90
Conclusion
Vertical: At 1 Hz, floor vibration was attenuated from VC-F toward VC-G.
Left to Right: At 1 Hz, floor vibration was attenuated from VC-F toward VC-G.
Front to Back: At 1 Hz, floor vibration was attenuated from VC-F by approximately 45%.
Measurement Summary
| Measurement site | Equipment state | Direction | Floor | DVIA-MB1000 |
|---|---|---|---|---|
| Location: Tier-1 Semiconductor Yongin campus 1. Floor 2. DVIA-MB1000 | Turned on/IDLE | Vertical | VC-F @ 1 Hz | VC-G @ 1 Hz |
| Left to Right | VC-F @ 1 Hz | VC-G @ 1 Hz | ||
| Front to Back | VC-F @ 1 Hz | VC-F @ 1 Hz |
Data and Image
Vertical VC Curves
Vertical Narrow Band
Vertical Transmissibility
Left to Right VC Curves
Left to Right Narrow Band
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Narrow Band
Front to Back Transmissibility
Equipment Picture
Reference
Generic Vibration Criteria
Notes:
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
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