Installation Report

DVIA-ULF Series

07-08-2025

FS2 Wadebro Cleanroom ZEISS Sigma 360 DVIA-ULF1000 Installation Report

DVIA-ULF Series

Installation Report

FS2

ZEISS

Overview

Tuning and vibration measurements were performed on the DVIA-ULF1000 installed in the Wadebro 1st-floor cleanroom.

Vibration measurement and tuning were carried out with the equipment installed and turned off.

Measurement data were presented as VC curves, and vibration-level reference materials are included.

Vibration Isolation System Information

Model: DVIA-ULF1000

Serial Number: 250523R3

Engineer

DAEIL SYSTEMS field engineers Chaewon Lee, Seongyun Jeong.

Measurement Date

July 8, 2025

Installation Site

Wadebro 1st-floor cleanroom.

End User

FS2

Equipment Status

장비설치/Turned off

Customer Equipment

Manufacturer: ZEISS

Equipment: FE-SEM

Model: Sigma 360

Vibration Specification

N/A

Measuring Equipment

10.1) PULSE 22

Hardware: B&K Front End Type 3050-A-040

Software: B&K Pulse Labshop 22 Version

10.2) Accelerometer

PCB Accelerometer

Model: 393B05

Measurement Setup

F Span: 200

Lines: 400

Engineering Units: m/s2

Window: Hanning

Averaging: FFT Spectrum Averaging

Average Mode: Exponential, 40

Conclusion

All directions meet the vibration specification.

Measurement Data

Measurement site	Status	Direction	Measurement		Result
Measurement site	Status	Direction	Floor	DVIA-ULF1000	Floor	DVIA-ULF1000
Wadebro 1st-floor cleanroom 1.Floor 2.DVIA-ULF1000	장비 설치 및 Turned off	Vertical	VC-B @ 12.5 Hz	VC-D @ 12.5 Hz	✗ FAIL	✓ PASS
		Left to Right	VC-D @ 63 Hz	VC-F @ 63 Hz	✗ FAIL	✓ PASS
		Front to Back	VC-D @ 63 Hz	VC-E @ 63 Hz	✗ FAIL	✓ PASS

Data and Image

Vertical VC Curves

Vertical Autospectrum

Left to Right VC Curves

Left to Right Autospectrum

Front to Back VC Curves

Front to Back Autospectrum

Equipment Picture

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

*Notes:*

- As measured in one-third octave bands over 8–80 Hz (VC-A/B) or 1–80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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