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Installation Report
DVIA-P Series
07-09-2025

Tier-1 Semiconductor DVIA-P2200(250115R1-2) Installation Report

DVIA-P Series
Installation Report
Tier-1 Semiconductor
Electro Mechanics
P2200

Overview

Tuning and vibration measurement were performed on the DVIA-P2200 installed at the Tier-1 Semiconductor Suwon site.

Vibration measurement and tuning were conducted with the equipment in the Turned on/IDLE state.

Data are presented as VC curves, and reference information on vibration levels is provided.

Vibration Isolation System Information

Model: DVIA-P2200

Serial Number: 250115R1-2

Engineer

Chaewon Lee from DAEIL SYSTEMS

Measurement Date

July 9, 2025

Installation Site

Tier-1 Semiconductor Suwon site, B5 1F constant temperature and humidity room

End User

Tier-1 Semiconductor

Equipment Status

Equipment installed / IDLE

Equipment Information

Manufacturer: Tier-1 Semiconductor

Equipment: Plating thickness gauge

Model: FCB PSP

Vibration Specifications

VC-B

Measuring Equipment

10.1) Data Physics DAQ

- Hardware: QUATTRO, Serial Number: 22436

- Software: SignalCalc ACE

10.2) Accelerometer

- PCB Accelerometer

- Model: 393B05

Measuring Set-up

F Span: 200

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Average Mode: Exponential, 40

Conclusion

The vibration specification is satisfied in all directions.

Measurement Data

Measuring PointStatusDirectionSpecMeasurement DataResult
FloorDVIA-P2200FloorDVIA-P2200
Tier-1 Semiconductor Suwon site, B5 1F constant temperature and humidity room
1. Floor Vibration
2. DVIA-P2200
Equipment
installed / IDLE
VerticalVC-BVC-C
@ 50 Hz
VC-G
@ 50 Hz
PASSPASS
Left to RightVC-BVC-B
@ 50 Hz
VC-G
@ 50 Hz
PASSPASS
Front to BackVC-BVC-B
@ 50 Hz
VC-G
@ 50 Hz
PASSPASS

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)
Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-P Series
Date07-09-2025
Tags
DVIA-P Series
Installation Report
Tier-1 Semiconductor
Electro Mechanics
P2200