Vibration Isolation Case Studies

DVIA-M1000 installation report — Raith Electron Beam Lithography Voyager MAX (serial 250402R6) at Tongji University, Shanghai, China. The report includes tuning-request UI capture, transmissibility plots (vertical, left to right, front to back) via the measurement UI, and an equipment photo; it does not include a measurement summary table or VC / Autospectrum plots. Vibration specification N/A. Equipment condition: The equipment is installed/Turned off.

DVIA-MO1000 installation report for DGIST (serial 240620R1). Measurement summary covers equipment Turned on/IDLE in three axes with VC curves, autospectra, transmissibility, and equipment photo.

DVIA-M1000 installation report (serial 250102R2-2) for Hitachi FE-SEM SU8600. Overview matches the published form. Prepared for, location, and end user fields are blank on the form and are shown as N/A. Equipment condition: The equipment is installed/Turned off. The published handout has no tuning-request figure; Data and Image publishes vertical, left-to-right, and front-to-back transmissibility plus an equipment picture. Reference uses the standard Generic Vibration Criteria markdown table only.

Tier-1 Semiconductor Giheung SR1 BRUKER Photomask Repair System RAVE NM-VI DVIA-P4000 Installation Report

DVIA-ULFB350 (S/N 250617R4) installation report for an ELP vision inspection system in the ELP cleanroom (Building A). Vertical, left-to-right, and front-to-back VC curves, autospectra, and transmissibility with the equipment installed and turned off.

DVIA-P7000 installation report (serial 250131R4) at Huahong FAB 9 for Dongfang Jingyuan Electron Limited E-beam wafer inspection system (SEpA_i515). Source DVIA-P7000_250131R4 installation report.docx; tuning 2025-07-25; report written 2025-07-28. Published VC curves for vertical, left-to-right, and front-to-back axes. Word letterhead graphic (image1) omitted from public copy; Reference uses the site VC criteria table (image5.emf not published).