Installation Report

DVIA-M Series

08-05-2025

DGIST DVIA-MO1000 (240620R1) Installation Report

DVIA-M Series

Installation Report

DGIST

DVIA-MO1000

240620R1

Overview

N/A

Vibration Isolation System Information

Model: DVIA-MO1000

Serial Number: 240620R1

Engineer

이채원

Tuning Date

25.08.04

Report written date

25.08.05

End User

N/A

Location

DGIST E2동 3층 318호

Equipment

N/A

Vibration specification

N/A

Equipment Condition

장비설치/IDLE

Measurement Summary

Measurement site	State	Direction	Floor	DVIA-MO1000
DGIST E2동 3층 318호 1.Floor 2.DVIA-MO1000	장비 Turned on/IDLE	Vertical	VC-C @ 40 Hz	VC-G @ 40 Hz
		Left to Right	VC-D @ 31.5 Hz	VC-G @ 31.5 Hz
		Front to Back	VC-D @ 8 Hz	VC-G @ 8 Hz

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Equipment picture

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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