Fudan University STM DVIA-MO1000 (221114R2) Installation Report

DVIA-M Series

Installation Report

Fudan University

STM

Shanghai

DVIA-MO1000

221114R2

Overview

The DVIA-MO1000 active vibration isolation platform is appropriately installed and functioning as intended.

Measurement date: 2023.02.10 (Friday)

Operator: DAEIL SYSTEMS, Youngha Lee, Hosang Yu

Place of measurement: SHANGHAI

Equipment Model: STM

Model: DVIA-MO1000

Serial Number: 221114R2

Operator: Lee, Young haDate of setup: 23.02.10Date of reporting: 23.02.

23.02.10

Date of reporting: 23.02.

17.12.27~17.12.29

Good Performance

Fudan University

N/A

SHANGHAI

Manufacturer: N/A

Equipment: STM

Model: N/A

N/A

Z axis

X axis

Y axis

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A