Vibration Isolation Case Studies

Tier-1 Semiconductor Giheung SR1 BRUKER Photomask Repair System RAVE NM-VI DVIA-P4000 Installation Report

DVIA-ULFB350 (S/N 250617R4) installation report for an ELP vision inspection system in the ELP cleanroom (Building A). Vertical, left-to-right, and front-to-back VC curves, autospectra, and transmissibility with the equipment installed and turned off.

DVIA-P7000 installation report (serial 250131R4) at Huahong FAB 9 for Dongfang Jingyuan Electron Limited E-beam wafer inspection system (SEpA_i515). Source DVIA-P7000_250131R4 installation report.docx; tuning 2025-07-25; report written 2025-07-28. Published VC curves for vertical, left-to-right, and front-to-back axes. Word letterhead graphic (image1) omitted from public copy; Reference uses the site VC criteria table (image5.emf not published).

DVIA-P4000 (SN 231101R8) tuning and vibration measurement at KIST L3 Building 1F Line for a JEOL JBX-A9 electron beam lithography system. Engineer Chaewon Lee (DAEIL SYSTEMS field engineer); measurement July 22, 2025; report written July 23, 2025. Published vibration specification capture, VC / autospectrum / transmissibility plots per axis, measurement summary table, and Generic Vibration Criteria as the standard markdown table (Bruker slogan banner image and Word reference EMF omitted).

Korea Institute of Machinery & Materials (KIMM) EL high vacuum chamber DVIA-P1000 installation report

DVIA-P2200 installation report for an EL High Vacuum Chamber at Korea Institute for Machinery & Materials (KIMM), L2 building 1F lab (isolator serial 250122R1-1). Vibration tuning and vibration measurement dated July 15, 2025; engineer Chaewon Lee (DAEIL SYSTEMS). Published figures per report: VC, Autospectrum, and Transmissibility for vertical, left-to-right, and front-to-back axes, plus equipment photo; Reference uses the Generic Vibration Criteria markdown table only (no supplementary diagram).