Installation Report

08-27-2025

COXEM DVIA-ULFB1000 Installation Report

DVIA-ULF Series

Installation Report

COXEM

Overview

The DVIA-ULFB1000 active vibration isolation platform is appropriately installed and functioning as intended.

Vibration Isolation System information

- Model: DVIA-ULFB1000

- Serial Number: 250711R2

Engineer

Chaewon Lee from DAEIL SYSTEMS

Mesurement Date

August 27, 2025

Location

Migun Techno World, Daejeon, Republic of Korea

End User

COXEM

Equipment Status

The equipment is installed / turned off

Equipment Information

- Manufacturer: ZEISS

- Equipment: FE-SEM

- Model: SUPRA 55VP

Vibration Specification

Image 1 — COXEM DVIA-ULFB1000 Installation Report

Image 2 — COXEM DVIA-ULFB1000 Installation Report

Measurement Equipment

- Data Physcis DAQ

- Hardware: QUATTRO, Serial Number: 22436

- Software: SignalCalc ACE

- Accelerometer: PCB 393B05

Measurement Set-up

- F Span: 0 - 200 Hz

- Lines: 3200

- Engineeing Units: m/s2

- Window: Hanning

- Averaging: FFT Spectrum Averaging

- Average Mode: Exponential, 40

Conclusion

The vibration isolation system satisfies the vibration specification in all directions with outstanding performance.

Measurement Data

Measurement Point	Status	Direction	Measured Data		Result
Measurement Point	Status	Direction	Floor	DVIA-ULFB1000	Floor	DVIA-ULFB1000
Migun Tech World Room 2209 1. Floor 2.DVIA-ULFB1000	The equipment is installed / Turned off	Vertical	VC-D @31.5 Hz	VC-G @31.5 Hz	✓ PASS	✓ PASS
		Left to Right	VC-E @1.6 Hz	VC-F @1.6 Hz	✓ PASS	✓ PASS
		Front to Back	VC-D @1 Hz	VC-G @1 Hz	✓ PASS	✓ PASS

Data and Image

Vertical VC Curve

Image 3 — COXEM DVIA-ULFB1000 Installation Report

Vertical Narrow Band

Image 4 — COXEM DVIA-ULFB1000 Installation Report

Vertical Transmissibility

Image 5 — COXEM DVIA-ULFB1000 Installation Report

Left to Right VC Curve

Image 6 — COXEM DVIA-ULFB1000 Installation Report

Left to Right Autospectrum

Image 7 — COXEM DVIA-ULFB1000 Installation Report

Left to Right Transmissibility

Image 8 — COXEM DVIA-ULFB1000 Installation Report

Front to Back VC Curve

Image 9 — COXEM DVIA-ULFB1000 Installation Report

Front to Back Autospectrum

Image 10 — COXEM DVIA-ULFB1000 Installation Report

Front to Back Transmissibility

Image 11 — COXEM DVIA-ULFB1000 Installation Report

Equipment Picture

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

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