Installation Report

DVIA-ULF Series

08-27-2025

COXEM ZEISS FE-SEM SUPRA 55VP DVIA-ULFB1000 Installation Report

DVIA-ULF Series

Installation Report

COXEM

ZEISS

SUPRA 55VP

DVIA-ULFB1000

250711R2

Overview

Tuning and vibration measurement were performed on the DVIA-ULFB1000 installed at Migun Techno World Phase 1, Room 2209.

Vibration measurement and tuning were performed with the equipment installed and turned off.

Measurement data are presented as VC curves, together with reference material on vibration levels.

Vibration isolation platform

Model: DVIA-ULFB1000

Serial Number: 250711R2

Engineer

Chaewon Lee, Field Engineer, DAEIL SYSTEMS

Measurement date

August 27, 2025

Installation site

Migun Techno World Phase 1, Room 2209

End User

COXEM

Equipment status

장비설치/Turned off

Customer equipment

Manufacturer: ZEISS

Equipment: FE-SEM

Model: SUPRA 55VP

Vibration specification

Vibration measurement equipment

10.1) Data Physics DAQ

Hardware: QUATTRO, Serial Number: 22436

Software: SignalCalc ACE

10.2) Accelerometer

PCB Accelerometer

Model: 393B05

Vibration measurement setup

F Span: 200

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Average Mode: Exponential, 40

Conclusion

The vibration specification is satisfied in all directions.

Measurement data

Measurement site	State	Direction	Measured data		Result
Measurement site	State	Direction	Floor vibration	DVIA-ULFB1000	Floor vibration	DVIA-ULFB1000
Migun Techno World Phase 1, Room 2209 1. Floor vibration 2. DVIA-ULFB1000	Equipment installed and Turned off	Vertical	VC-D @ 31.5 Hz	VC-G @ 31.5 Hz	✓ PASS	✓ PASS
		Left to Right	VC-E @ 1.6 Hz	VC-F @ 1.6 Hz	✓ PASS	✓ PASS
		Front to Back	VC-D @ 1 Hz	VC-G @ 1 Hz	✓ PASS	✓ PASS

Data and images

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospecturm

Front to Back Transmissibility

Installation photo

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

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