Installation Report

DVIA-M Series

07-03-2025

ZEISS Innovation Center Sigma 360 VP DVIA-M1000 Installation Report (YIMO, Shanghai, 2025-07-03)

DVIA-M Series

Installation Report

YIMO

ZEISS

Sigma 360 VP

DVIA-M1000

Shanghai

Overview

The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.

Vibration Isolation System Information

Model: DVIA-M1000

Serial Number: 220121R3

Engineer

Chaewon Lee DAEIL SYSTEMS

Tuning Date

July 03, 2025

Report written date

July 03, 2025

End User

ZEISS Innovation Center

Number of Tuning Trial

4th

Location

Shanghai, China

Equipment

Manufacturer: ZEISS

Equipment: FE-SEM

Model: Sigma 360 VP

Equipment Condition

The equipment is installed/IDLE

Tuning Request

Data and Image

Internal program Transmissibility (Vertical, Left to Right, Front to Back) and the equipment picture.

Vertical Transmissibility

Left to Right Transmissibility

Front to Back Transmissibility

Equipment picture

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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