Tsinghua University ZEISS MultiSEM DVIA-M1000 (230105R1-1) Installation Report

DVIA-M Series

Installation Report

Tsinghua University

ZEISS

MultiSEM

SEM

DVIA-M1000

230105R1-1

Overview

The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.

Model: DVIA-M1000

Serial Number: 230105R1-1

Chaewon Lee from DAEIL SYSTEMS

July 03, 2025

2nd (1st: 25.06.20)

Beijing

Tsinghua University

Manufacturer: ZEISS

Equipment: SEM

Model: MultiSEM

The equipment is installed/IDLE

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A