Installation Report
DVIA-M Series
05-15-2026
Chinese Academy of Sciences — Institute of Metal Research ZEISS GeminiSEM360 DVIA-M1000 (230328R2) Installation Report
DVIA-M Series
Installation Report
Chinese Academy of Sciences
Institute of Metal Research
ZEISS
GeminiSEM360
SEM
DVIA-M1000
230328R2
Shenyang
Contents
INSTITUTE OF METAL RESEARCH,CHINESE ACADEMY OF SCIENCES
INSTITUTE OF METAL RESEARCH,CHINESE ACADEMY OF SCIENCES
(M1000_230328R2 Set up)
Site checklist
| Target equipment | GeminiSEM360 |
|---|---|
| Place of installation | Shenyang |
| Remark | Good Performance |
| END USER | INSTITUTE OF METAL RESEARCH,CHINESE ACADEMY OF SCIENCES |
Operator and dates
Operator: Park, Jongwon
Date of setup: 23.09.06
Date of reporting: 23.09.15
Date of business trip : 17.12.27~17.12.29
Overview
The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.
Measurement date: 2023.09.06 (Wednesday)
Operator: DAEIL SYSTEMS Jongwon Park
Place of measurement: Shenyang
Equipment Model: GeminiSEM360
5.
M1000 internal program performance measurement result
Z axis
X axis
Y axis
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Case Study Information
Category
Installation Report
SeriesDVIA-M Series
Date05-15-2026
Tags
DVIA-M Series
Installation Report
Chinese Academy of Sciences
Institute of Metal Research
ZEISS
GeminiSEM360
SEM
DVIA-M1000
230328R2
Shenyang
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