Vibration Isolation Case Studies
DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.
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All Case Studies

Thermo Fisher Scientific Helios 5 FIB-SEM DVIA-ML1000 Installation Report
TFS Helios 5 on DVIA-ML1000 (250904R2) — see report for HWL / VC spec summary.

QRT DVIA-ML3000 (251111R3) Installation Report — 2026.03.04
DVIA-ML3000 (serial 251111R3) at Korea Institute of Nano Technology, 1F QRT lab, for customer QRT, supporting a Thermo Fisher Scientific Cryo-TEM Spectra 200. Measurement date 26.03.04, report date 26.03.05; engineer 이채원. Tuning and measurement were performed with the customer equipment Turned on/IDLE. Data Physics QUATTRO DAQ with SignalCalc ACE and a PCB 393B05 accelerometer; VC / Autospectrum / Transmissibility plots for vertical, left-to-right, and front-to-back; equipment specification and seven installation photos as published figures; measurement summary table; Reference as a markdown Generic Vibration Criteria table.

Youngil Precision Keyence VR-6000 DVIA-T67 DEMO Inspection Report
DVIA-T67 DEMO inspection and vibration report at Youngil Precision Ansan site 5F OQA room — Keyence VR-6000 3D profile measurement system. Tuning and vibration measurement with equipment Turned on/IDLE; intermittent fault analysis, VC-curve plots by axis, and Reference table.

ZEISS FE-SEM Sigma 360 DVIA-ULF700 Installation Report
DVIA-ULF700 (serial 251017R2) installation and vibration tuning with ZEISS FE-SEM Sigma 360 where End User and Location were not disclosed in the report (N/A). Includes vibration specification capture, VC / autospectrum / transmissibility plots, and VC reference table (no decorative header or EMF curve upload).

Tier-1 Semiconductor Fabrication Facility Giheung Tokyo Electron Precio XL DVIA-P4000 Installation Report
Tier-1 Semiconductor Fabrication Facility Giheung Tokyo Electron Precio XL Installation Report
Tier-1 Semiconductor Pyeongtaek P1 ZEISS Gemini SEM 460 DVIA-ML1000 Installation Report
Tier-1 Semiconductor Pyeongtaek P1 1F — ZEISS Gemini SEM 460 on DVIA-ML1000. Includes manufacturer equipment-vibration spec diagram, VC/Autospectrum/Transmissibility.