Vibration Isolation Case Studies
DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.
Series
Equipment Type
Manufacturer
All Case Studies
ZEISS FE-SEM Sigma 360 DVIA-ULF700 Installation Report
DVIA-ULF700 (serial 251017R2) installation and vibration tuning with ZEISS FE-SEM Sigma 360 where End User and Location were not disclosed in the report (N/A). Includes vibration specification capture, VC / autospectrum / transmissibility plots, and VC reference table (no decorative header or EMF curve upload).
Tier-1 Semiconductor Fabrication Facility Giheung Tokyo Electron Precio XL DVIA-P4000 Installation Report
Tier-1 Semiconductor Fabrication Facility Giheung Tokyo Electron Precio XL Installation Report
Tier-1 Semiconductor Pyeongtaek P1 ZEISS Gemini SEM 460 DVIA-ML1000 Installation Report
Tier-1 Semiconductor Pyeongtaek P1 1F — ZEISS Gemini SEM 460 on DVIA-ML1000. Includes manufacturer equipment-vibration spec diagram, VC/Autospectrum/Transmissibility.
KIMM Self-made DVIA-P550 Installation Report
KIMM Self-made DVIA-P550 Installation Report
Covis Technology AID Robotics DVIA-ML1000S & DVIP-B Installation Report
AID Robotics 1F — DVIA-ML1000S and DVIP-B (SN 260108R1).
Tier-1 Electronics Component Manufacturer ZEISS Xradia 620 Versa DVIA-MB3000 (201201R2) Installation Report — 2026.02.09
On-site worksheet dated 2026.02.09 for DVIA-MB3000 serial 201201R2 supporting ZEISS Xradia 620 Versa at Tier-1 Electronics Component Manufacturer (Gumi Plant 4, X-ray CT Room). With customer equipment **Turned on/IDLE**, tuning and vibration measurement were performed and results are plotted on VC curves alongside an equipment-spec diagram. Measurement summary PASS/FAIL is tabulated below; Generic Vibration Criteria are published here as the standard markdown Reference table without a standalone reference illustration.