Vibration Isolation Case Studies

Five DVIA-MO1000 active vibration isolation platforms, serials 211126R3-1 through 211126R3-5, delivered to DIAT Pune India. Engineer Chaewon Lee of DAEIL SYSTEMS completed the first tuning trial on March 18, 2026 while the equipment was still uninstalled, and floor vibration is attenuated by more than 90% in the 2–10 Hz frequency range in all directions. Vertical, left-to-right and front-to-back transmissibility captured through the UI program is published for every one of the five units, together with two site photographs of the installed optical benches. Standard Generic Vibration Criteria are given as a table.

DVIA-ULF700 (serial 250708R1-2) tuning and vibration measurement at a Tier-1 Semiconductor fab 1F analytical laboratory with SEM-Testbed (model line “-” in the report form). Measurement on 2026-03-19; report written 2026-03-20. VC / autospectrum / transmissibility for three axes at Turned on/IDLE on the isolation platform vs floor; all axes VC-G @ 1 Hz per the measurement summary table. Overview notes vibration from the mounted equipment during tuning/measurement. Reference uses the markdown VC criteria table only (no artwork upload).

YIMO-format report — serial 250923R3, DVIA-ULF700. 2nd tuning (1st Dec 2025). FE-SEM Sigma 360; vibration spec diagram, UI VC / Autospectrum / Transmissibility and equipment photo.

DVIA-ULFB700 tuning and vibration measurement (serial 260212R2-2) at the TESCAN Korea Demo Room, Rue West City Building B 2F, with FE-SEM Mira XR installed. Engineer Chaewon Lee (DAEIL SYSTEMS); installation and tuning dated 2026-03-12; report dated 2026-03-13. Equipment specification is given as text on the form; nine measurement plots (VC curves, autospectra, transmissibility by axis) are published. The TESCAN slogan banner at the top of the Word file and the reference EMF under 참고자료 are omitted in favor of the standard markdown Generic Vibration Criteria table.

TESCAN Korea Demo room — TESCAN Amber FIB-SEM on DVIA-ML1000 (SN 260212R2-1).

DVIA-ML1000 installation report (serial 241016R4) for Hitachi SU3800 SEM. Overview states the platform is appropriately installed and functioning as intended. Prepared for and location are N/A on the form; measurement summary compares floor vs DVIA-ML1000 with equipment turned on/IDLE. Vibration specification is given as a diagram; tuning request N/A; UI-program VC, autospectrum, and transmissibility plots per axis; equipment photo; Reference uses the standard Generic Vibration Criteria markdown table.