China Color Innovation Institute Thermo Fisher Scientific Apreo 2S SEM DVIA-ML1000 Installation Report
Contents
Overview
Following the installation of DVIA-ML1000, tuning and vibration measurement were performed.
Data is represented in VC Curve format and reference material on the vibration level is provided.
Vibration Isolation System Information
Model: DVIA-ML1000
Serial Number: 251023R5
Engineer
Chaewon Lee, DAEIL SYSTEMS
Tuning Date
2026.04.02
End User
China Color Innovation Institute
Number of Tuning Trial
1st
Location
Tianjin City
Equipment
Manufacturer: Thermo Fisher Scientific
Equipment: SEM
Model: Apreo 2S
Vibration Specification
Measurement Summary
| Measurement Point | VibrationSpecification | Axis | Floor | DVIA-ML1000 |
|---|---|---|---|---|
| 1. Floor 2. DVIA-ML1000 | VC-F | Vertical | ✗ FAIL | ✓ PASS |
| Left to Right | ✗ FAIL | ✓ PASS | ||
| Front to Back | ✗ FAIL | ✓ PASS |
Measurement Data
Vertical VC Curves
Vertical Autospectrum
Vertical Transmissibility
Left to Right VC Curves
Left to Right Autospectrum
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Autospectrum
Front to Back Transmissibility
Equipment Photo
Reference
The table below classifies vibration levels based on IEST-RP-CC012.2.
Notes:
1. As measured in one-third octave bands of frequency over the frequency 8 to 80 Hz (VC-A and VC-B) or 1 to 80 Hz (VC-C through VC-G).
2. The detail size refers to line width in the case of microelectronics fabrication, the particle (cell) size in the case of medical and pharmaceutical research, etc.
3. The detail size is not relevant to imaging associated with probe technologies, AFMs, and nanotechnology.
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