Vibration Isolation Case Studies
DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.
Series
Equipment Type
Manufacturer
All Case Studies
Tier-1 Semiconductor Hwaseong ZEISS Xradia 730 Versa DVIA-ML3000 (251107R2) Installation Report
DVIA-ML3000 (251107R2) installation report at Tier-1 Semiconductor Hwaseong campus — ZEISS X-ray Microscope Xradia 730 Versa. VC-C equipment spec; UI VC / Autospectrum / Transmissibility for vertical, left-to-right, and front-to-back; standard Reference vibration criteria as a markdown table.

Thermo Fisher Scientific Apreo 2S SEM DVIA-ML1000 (251023R5) Installation Report
DVIA-ML1000 tuning and vibration measurement with Thermo Fisher Scientific Apreo 2S SEM (Turned on / IDLE). Manufacturer vibration-spec diagram, VC / Autospectrum / Transmissibility; measurement summary: floor points FAIL, on-isolator PASS per axis in the table.

Seoul National University Thermo Fisher Scientific Glacios DVIA-MB1000 (210121R5) Installation Report
DVIA-MB1000 installation report (serial 210121R5) for a Thermo Fisher Scientific Glacios Cryo-TEM at Seoul National University Institute for Genetic Engineering — tuning and vibration measurements with the equipment in Turned on/IDLE. Publishes equipment specification diagram, VC / autospectrum / transmissibility plots by axis, site installation photograph, and Generic Vibration Criteria as the standard markdown table.

Hitachi SEM SU8230 DVIA-M1000 (250421R6) Installation Report
DVIA-M1000 installation report — Hitachi SEM model SU8230 (serial 250421R6). Overview states the platform is appropriately installed and functioning as intended. Vibration specification Vertical: VC-F, Horizontal: VC-G. End user and location N/A. Equipment condition The equipment is turned on/IDLE; tuning request N/A. Published plots are VC curves, Autospectrum, and Transmissibility (vertical, left-to-right, front-to-back) from the UI program, plus equipment photo. The source form has no measurement summary table; reference uses the standard generic vibration criteria table.

YIMO SINANO Ultrafast Pump–Probe STM DVIA-ML1000 (250715R6) Installation Report
DVIA-ML1000 installation report — Suzhou Institute of Nano-Tech and Nano-Bionics Ultrafast Pump–Probe scanning tunneling microscope (250715R6). The overview notes table-mounted equipment rigidly tied to the floor and horizontal-axis performance below target in some frequency bands. Form vibration specification N/A; measurement summary compares floor vs on DVIA-ML1000 at dominant frequencies. UI-program VC / Autospectrum / Trans plots and equipment photo.

KYKY SEM EM-8200 DVIA-ML1000 (250107R5) Installation Report
DVIA-ML1000 installation report (serial 250107R5).