Vibration Isolation Case Studies

DVIA-ML1000 installation report — Thermo Fisher Scientific SEM Apreo 2 C (serial 251218R1-2) for Gränges Aluminium in Shanghai, China. Overview states the platform is appropriately installed and functioning as intended. Vibration specification as UI capture; equipment condition The equipment is turned on/IDLE; tuning request N/A. Measurement summary compares floor vs DVIA-ML1000 with PASS/FAIL per axis. UI-program VC curves, Autospectrum, Transmissibility (vertical, left to right, front to back) and equipment photo.

DVIA-ML1000 installation report (serial 260110R3) for ZEISS FIB-SEM Crossbeam 550 at Zhejiang Eagle Semiconductor Vibration Isolation Table, Zhejiang, China. Tuning April 20, 2026; report April 23, 2026. Engineer Chaewon Lee (DAEIL SYSTEMS). Equipment condition per report: The equipment is turned on/IDLE. Measurement summary: floor and platform PASS all axes; vibration specification per UI (item 9). Published: vibration specification capture, VC / Autospectrum / Transmissibility per axis. Reference is the standard Generic Vibration Criteria markdown table only.

Tier-1 Semiconductor Advanced Institute Building B cleanroom DVIA-P7000 tuning and vibration measurement with JEOL JBX-9500FS electron beam lithography system.

DVIA-ML3000 (S/N 260128R4) installation report at GUANGZHOU GRG METROLOGY & TEST CO., LTD., Zhejiang, China — Thermo Fisher Scientific TEM Talos. Published figures: vibration specification and tuning-request UI captures, vertical / lateral / longitudinal VC curves, autospectra, and transmissibility from the measurement program; onsite equipment photo. Measurement Summary cites “Refer to item 9”; vertical axis FAIL on floor versus PASS on the platform; lateral and longitudinal follow the report table.

DVIA-ML1000 installation report — TESCAN Amber FIB-SEM (serial 251117R7) for Jiasheng Advanced Technology, Suzhou, China. Overview states the platform is appropriately installed and functioning as intended. Vibration specification as TESCAN Amber environmental-spec table image; equipment turned on/IDLE; tuning request N/A. Measurement summary PASS on floor and on DVIA-ML1000 for vertical, left-to-right, and front-to-back. UI-program VC curves, Autospectrum, Transmissibility per axis and equipment photo.

DVIA-UD350 (S/N 221004R4) installation report at KIST (L7222): UI program images, Vertical / Left-to-Right / Front-to-Back VC curves, Autospectrum, and Transmissibility with equipment Turned on/IDLE.