Installation Report

DVIA-P Series

04-22-2026

Tier-1 Semiconductor Advanced Institute JEOL JBX-9500FS DVIA-P7000 Installation Report

DVIA-P Series

Installation Report

Tier-1 Semiconductor Advanced Institute

JEOL

JBX-9500FS

Overview

Inspection and vibration measurement were performed on the DVIA-P7000 installed at the Tier-1 Semiconductor Advanced Institute Building B 1F cleanroom laboratory.

During inspection there were no functional issues, but air pressure was somewhat low; increasing air pressure is recommended for stable equipment operation.

Performance had degraded somewhat during inspection, so re-tuning was performed.

Inspection and vibration measurement were conducted with the equipment in Turned on/IDLE state.

Data are presented as VC curves along with reference materials for vibration level assessment.

Vibration Isolation System Information

Model: DVIA-P7000

Serial Number: 181022R1

Engineer

Chaewon Lee from DAEIL SYSTEMS

Tuning Date

April 22, 2026

Installation Site

Tier-1 Semiconductor Advanced Institute Building B 1F cleanroom laboratory

End User

Tier-1 Semiconductor Advanced Institute

Equipment

Manufacturer: JEOL

Equipment: Electron Beam Lithography System

Model: JBX-9500FS

Equipment specification

Equipment Status

장비 설치 및 Turned on/IDLE

Measuring Equipment

10.1) Data Physics DAQ

-Hardware: QUATTRO, Serial Number: 22436

-Software: SignalCalc ACE

10.2) Accelerometer

PCB Accelerometer

Model: 393B05

Measuring Set-up

F Span: 200 Hz

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Averaging mode: Exponential, 40

Conclusion

Meets vibration specifications in all directions.

Measurement Data

Measuring Point	Status	Direction	Spec	Grating	DVIA-P7000	Grating	DVIA-P7000
Tier-1 Semiconductor Advanced Institute Building B 1F cleanroom laboratory 1. Grating 2. DVIA-P7000	Turned on/IDLE	Vertical	8번 항목 참고	11.8 @ 17.7 Hz	1.09 @ 17.7 Hz	✗ FAIL	✓ PASS
		Left to Right		2.99 @ 17.8 Hz	0.119 @ 17.8 Hz	✓ PASS	✓ PASS
		Front to Back		5.5 @ 17.8 Hz	0.170 @ 17.8 Hz	✓ PASS	✓ PASS

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospecturm

Front to Back Transmissibility

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A