Korea Institute of Science and Technology JEOL JBX-A9 E-Beam Lithography DVIA-P4000 Installation Report
Contents
Overview
Tuning and vibration measurement were performed after inspecting the DVIA-P4000 installed at the Korea Institute of Science and Technology (KIST) L3 Building 1F Line.
Inspection and vibration measurement were conducted with the equipment Turned On, IDLE.
The measured data are presented as VC Curves, and reference criteria for vibration levels are provided.
Vibration Isolation System Information
Model: DVIA-P4000
Serial Number: 231101R8
Engineer
Doyun Lee (Principal Engineer), DAEIL SYSTEMS
Seongyun Jeong (Researcher), DAEIL SYSTEMS
Tuning Date
May 22, 2026
Installation Site
L3 Building 1F Line
End User
Korea Institute of Science and Technology (KIST)
Customer Equipment
Manufacturer: JEOL
Equipment: E-Beam Lithography
Model: JBX-A9 (1825 x 1565 mm, 4500 kg)
Conclusion
At the initial set-up the regulator supply pressure was set to 5.6 bar, but during the site visit it had dropped to 4.6 bar and a POS Alarm was occurring. The supply pressure was re-adjusted to 5.0 bar and the POS Alarm was cleared; however, the site's pneumatic supply was found to be unstable, so optimizing purely for performance was judged likely to reproduce the same problem. Since the vibration measurement results already satisfied the equipment's required vibration specification with sufficient margin, the system was tuned with a focus on long-term operational stability rather than maximum performance.
Vibration Specification
| Frequency [Hz] | Spec [µm/s RMS] |
|---|---|
| 0.5 | 1000 |
| 1 | 470 |
| 2 | 80 |
| 3.5 | 45 |
| 9 | 90 |
| 10 | 40 |
| 14 | 33 |
| 17 | 160 |
| 100 | 25 |
Vibration Specification Chart
Equipment Status
Turned On, IDLE
Measuring Equipment
Measurement Equipment
- Hardware: B&K Front End Type 3040-A-040
- Software: B&K Pulse Labshop 22 Version
Accelerometer: 393B05
Measuring Set-up
F Span: 200 Hz
Lines: 3200
Engineering Units: m/s^2
Window: Hanning
Averaging: FFT Spectrum Averaging
Measurement Summary
| Measurement Point | Vibration Specification | Axis | Floor | DVIA-P4000 |
|---|---|---|---|---|
| 1. Floor 2. DVIA-P4000 | Refer to Vibration Specification | Vertical | ✓ PASS | ✓ PASS |
| Left to Right | ✓ PASS | ✓ PASS | ||
| Front to Back | ✓ PASS | ✓ PASS |
Data and Image
Vertical Autospectrum
Left to Right Autospectrum
Front to Back Autospectrum
Reference
Notes:
1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.
2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.
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