Installation Report

DVIA-P Series

07-23-2025

Korea Institute of Science and Technology (KIST) JEOL JBX-A9 Electron Beam Lithography DVIA-P4000 Installation Report

DVIA-P Series

Installation Report

KIST

JEOL

JBX-A9

Electron Beam Lithography

DVIA-P4000

231101R8

Overview

Data are presented as VC curves with reference materials for vibration level assessment.

Vibration measurement and tuning were conducted with the equipment in Turned on/IDLE state.

Tuning and vibration measurement were performed on the DVIA-P4000 installed at Korea Institute of Science and Technology (KIST).

Isolation Platform

Model: DVIA-P4000

Serial Number: 231101R8

Engineer

Chaewon Lee from DAEIL SYSTEMS

Measurement Date

July 22, 2025

Installation Site

Korea Institute of Science and Technology (KIST) L3 Building 1F Line

End User

Korea Institute of Science and Technology (KIST)

Equipment Status

장비설치/IDLE

Customer Equipment

Model: JBX-A9

Equipment: Electron Beam Lithography

Manufacturer: JEOL

Vibration specification

Measuring Equipment

10.1) PULSE 22

-Hardware: B&K Front End Type 3050-A-040

-Software: B&K Pulse Labshop 22 Version

10.2) Accelerometer

PCB Accelerometer

Model: 393B05

Measuring Set-up

F Span: 200

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Average Mode: Exponential, 40

Conclusion

Meets vibration specifications in all directions.

Measurement Data

Measuring Point	Status	Direction	Floor — measurement	DVIA-P4000 — measurement	Floor — result	DVIA-P4000 — result
Korea Institute of Science and Technology (KIST) L3 Building 1F Line 1. Base Pad 2. DVIA-P4000	장비설치/IDLE	Vertical	VC-B @ 63 Hz	VC-G @ 63 Hz	✗ FAIL	✓ PASS
		Left to Right	VC-D @ 63 Hz	VC-G @ 63 Hz	✓ PASS	✓ PASS
		Front to Back	VC-D @ 63 Hz	VC-G @ 63 Hz	✓ PASS	✓ PASS

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A