Vibration Isolation Case Studies

DVIA-ML1000 installation report (serial 240719R3-2) for Thermo Fisher Helios Nanolab 450 FIB-SEM at NM-TECH, Moscow Zelenograd.

DVIA-MO1000 installation report (serial 241101R3) for Ciqtek SEM 5000X. Prepared for and end user fields are not filled on the form (N/A).

DVIA-ML1000 installation report (serial 260203R3) for ZEISS FE-SEM Sigma 360 at Fuchuang Precision Semiconductor, Beijing, China — 1st tuning May 8, 2026 (report written May 11, 2026). Engineer Juhyeok Kim (DAEIL SYSTEMS). Vibration specification is a UI capture; vertical floor RMS FAIL with platform PASS; horizontal axes PASS. Publishes vibration specification and UI-program VC curves, autospectra, and transmissibility for vertical, left-to-right, and front-to-back axes. Reference uses the standard Generic Vibration Criteria markdown table only.

DVIA-T56 re-tuning report (serial 250102R2) for SCINCO STA 1000 at Shuyu Industrial Co., Ltd. Overview documents re-tuning due to active vibration oscillation. Vibration specification and tuning request read N/A; equipment condition matches the report wording. Measurement summary compares floor versus DVIA-T56 under turned-on equipment state. Measurement Data Obtained via UI Program publishes VC curves, Autospectrum, and Transmissibility for vertical, left-to-right, and front-to-back axes. Equipment photography was not permitted on site. Reference uses the standard Generic Vibration Criteria markdown table only (Word Reference EMF omitted). Decorative header strip before the title block is omitted from the public page.

DVIA-T78 (serial 211213R1) installation report for WONIK IPS Jinwi site, 4F wafer analysis lab. Overview: inspection of the installed isolator, Turned on/IDLE vibration measurement, and VC-curve data with Reference. Customer tool Bruker Nano Indentation tester TS77. Installation 26.04.29, tuning and vibration measurement on April 29, 2026. UI plots: VC curves, autospectra, and transmissibility by axis; §14-2 compares steady-state vibration data with data captured during TS77 image noise events. Conclusion states the isolator meets strong attenuation targets and that noise correlation points to elevated building-floor energy in 1–10 Hz rather than isolator malfunction; relocation to a quieter floor is recommended. Reference publishes the standard VC criteria table (no separate vibration-spec figure in the source form).

DVIA-T67 (serial 221012R8) installation report for Pukyong National University Yongdum campus advanced practice building, first-floor analysis lab. Overview describes post-installation tuning and vibration measurement, turned-off inspection runs, and VC-curve data with Reference. Floor vibration VC-A to VC-D by axis was reduced to VC-G on the isolator; conclusion states vibration remained below VC-F across directions and bands. Plots: VC curves, autospectra, transmissibility, installation photos; Reference table as published.