Vibration Isolation Case Studies

DVIA-ML1000 installation report — JEOL SEM model JSM-IT500HR (serial 250829R1) at Gedeon Richter Laboratory. Vibration specification is published as the UI capture under Vibration specification; End User N/A on the form. Equipment status and measurement summary (floor vs DVIA-ML1000) per the report; Conclusion notes floor vibration within specification on all axes after installation. VC curves, Autospectrum, and Transmissibility plots per axis from the measurement UI program.

DVIA-ULFB700 (S/N 260112R4) active vibration isolation platform installation report at Yiwu, China. Hitachi SU5000 FE-SEM — tuning April 23, 2026. Vertical / Left-to-Right / Front-to-Back VC Curves, Autospectrum, and Transmissibility on the DVIA-ULFB700 with equipment turned on/IDLE; tuning request UI capture, vibration specification table, and equipment photos.

QIYUE TECHNOLOGY SEM660F FIB-SEM at Qingdao Aviation Technology Industry Innovation Base (Qingdao, China), YIMO TECH channel — DVIA-ML1000 installation report for the 3rd tuning trial, tuned 2026-04-20 with the equipment turned on/IDLE. The floor reached VC-E at 31.5 Hz vertically and VC-G left to right and front to back, while the DVIA-ML1000 platform held VC-G on all three axes. The engineer also noted that a cooling fan mounted beneath the equipment blows directly onto the platform and affects its performance. Per-axis VC Curves, Autospectrum and Transmissibility plots from the UI program are published together with the on-site equipment photo.

DVIA-ML1000 installation report — Thermo Fisher Scientific SEM Apreo 2 C (serial 251218R1-2) for Gränges Aluminium in Shanghai, China. Overview states the platform is appropriately installed and functioning as intended. Vibration specification as UI capture; equipment condition The equipment is turned on/IDLE; tuning request N/A. Measurement summary compares floor vs DVIA-ML1000 with PASS/FAIL per axis. UI-program VC curves, Autospectrum, Transmissibility (vertical, left to right, front to back) and equipment photo.

DVIA-ML1000 installation report (serial 260110R3) for ZEISS FIB-SEM Crossbeam 550 at Zhejiang Eagle Semiconductor Vibration Isolation Table, Zhejiang, China. Tuning April 20, 2026; report April 23, 2026. Engineer Chaewon Lee (DAEIL SYSTEMS). Equipment condition per report: The equipment is turned on/IDLE. Measurement summary: floor and platform PASS all axes; vibration specification per UI (item 9). Published: vibration specification capture, VC / Autospectrum / Transmissibility per axis. Reference is the standard Generic Vibration Criteria markdown table only.

Tier-1 Semiconductor Advanced Institute Building B cleanroom DVIA-P7000 tuning and vibration measurement with JEOL JBX-9500FS electron beam lithography system.