QIYUE TECHNOLOGY In situ SEM 660F DVIA-M1000 (240411R7) Installation Report

DVIA-M Series

Installation Report

QIYUE TECHNOLOGY

SEM

In situ SEM 660F

DVIA-M1000

240411R7

Overview

The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.

Model: DVIA-M1000

Serial Number: 240411R7

Chaewon Lee from DAEIL SYSTEMS

August 30, 2024

September 9, 2024

1st

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Manufacturer: QIYUE TECHNOLOGY

Equipment: SEM

Model: In situ SEM 660F

The equipment is installed/Turned off

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Criterion Curve	Description	Amplitude µm/s (µin/s)	Detail Size µm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A