Vibration Isolation Case Studies
DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.
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All Case Studies
YIMO Haitai Semiconductor optical platform DVIA-MB1000 (240517R5) Installation Report
DVIA-MB1000 installation report (serial 240517R5) for an optical platform installation via YIMO at Haitai Semiconductor, WuXi, China.
NM-TECH Moscow Thermo Fisher Helios Nanolab 450 DVIA-ML1000 (240719R3-2) Installation Report
DVIA-ML1000 installation report (serial 240719R3-2) for Thermo Fisher Helios Nanolab 450 FIB-SEM at NM-TECH, Moscow Zelenograd.
YIMO Epin Shanghai STM DVIA-MO1000 (240930R7) Installation Report — January 14, 2025
DVIA-MO1000 installation report (serial 240930R7) for Epin STM in Shanghai, China; tuning January 14, 2025.
YIMO Epin Shanghai STM DVIA-MO1000 (240930R7) Installation Report — March 5, 2025
DVIA-MO1000 second tuning report (serial 240930R7) for Epin STM in Shanghai, China; tuning March 5, 2025 (2nd tuning).
YIMO Ciqtek SEM 5000X DVIA-MO1000 (241101R3) Installation Report
DVIA-MO1000 installation report (serial 241101R3) for Ciqtek SEM 5000X via YIMO. Prepared for and end user fields are not filled on the form (N/A).
Fuchuang Precision Semiconductor ZEISS Sigma 360 FE-SEM DVIA-ML1000 (260203R3) Installation Report
DVIA-ML1000 installation report (serial 260203R3) for ZEISS FE-SEM Sigma 360 at Fuchuang Precision Semiconductor, Beijing, China — 1st tuning May 8, 2026 (report written May 11, 2026). Engineer Juhyeok Kim (DAEIL SYSTEMS). Vibration specification is a UI capture; vertical floor RMS FAIL with platform PASS; horizontal axes PASS. Publishes vibration specification and UI-program VC curves, autospectra, and transmissibility for vertical, left-to-right, and front-to-back axes. Reference uses the standard Generic Vibration Criteria markdown table only.