Vibration Isolation Case Studies

DVIA-P4000 (serial 181106R6) inspection and vibration measurement report at a Tier-1 semiconductor advanced institute (Giheung, Building B, 1F cleanroom)—Hitachi CD-SEM CG4000, equipment Turned on/IDLE. Publishes equipment specification graphic, VC / autospectrum / transmissibility by axis, measurement summary table, and Generic Vibration Criteria as the standard markdown table (no VC reference raster).

Tier-1 Semiconductor Advanced Institute Building B 1F cleanroom laboratory DVIA-P2200 tuning and vibration measurement with JEOL JBX-8100FS electron beam lithography system. VC, autospectrum, and transmissibility by axis.

DVIA-MB1000 installation report (serial 240103R5) for Thermo Fisher Apreo 2S, Ningde, China. Tuning request UI capture; transmissibility plots; Reference as VC markdown table.

DVIA-MB1000 installation report (serial 240103R6) for Hitachi SU8600 FE-SEM, Shanghai, China. Allowable-vibration figures and transmissibility plots; Reference VC table.

DVIA-M1000 installation report — ZEISS FE-SEM Sigma 500 (serial 240119R3) prepared for Shanghai Jiaotong University, Shanghai, China. Overview states the platform is appropriately installed and functioning as intended. Equipment condition The equipment is installed. Tuning Request UI capture, vertical / left-to-right / front-to-back transmissibility plots, on-site equipment photo; Reference uses the standard VC criterion table.

DVIA-MB1000 installation report (serial 240119R4-1) for Thermo Fisher Hellos 5 UC, Hefei, China. Tuning UI, transmissibility, equipment photo; Reference VC table.