Installation Report

DVIA-P Series

05-11-2026

Tier-1 Semiconductor Advanced Institute Giheung Hitachi CD-SEM CG4000 DVIA-P4000 (181106R6) Installation Report

DVIA-P Series

Installation Report

Tier-1 Semiconductor

Hitachi

CD-SEM

CG4000

DVIA-P4000

181106R6

Overview

Inspection and vibration measurements were performed on the DVIA-P4000 installed at the Tier-1 semiconductor advanced institute Giheung—Building B, 1st floor cleanroom laboratory.

There were no functional issues during inspection, but facility air pressure was somewhat low; increasing air pressure afterward is recommended for stable equipment operation.

Performance was somewhat degraded during inspection, so re-tuning was performed.

Inspection and vibration measurements were performed with the equipment in Turned on/IDLE state.

Results are displayed as VC curves, and vibration-level reference materials are provided.

Installation date

26.04.22

Report written date

26.05.11

Vibration Isolation System Information

Model: DVIA-P4000

Serial Number: 181106R6

Engineer

Chaewon Lee from DAEIL SYSTEMS

Tuning Date

April 22, 2026

Installation Site

Tier-1 semiconductor advanced institute Giheung—Building B, 1st floor cleanroom laboratory

End User

Tier-1 Semiconductor

Customer Equipment

Manufacturer: Hitachi

Equipment: CD-SEM

Model: CG4000

Equipment Specification

Equipment Status

장비 설치 및 Turned on/IDLE

Measuring Equipment

10.1) Data Physics DAQ

-Hardware: QUATTRO, Serial Number: 22436

-Software: SignalCalc ACE

10.2) Accelerometer

PCB Accelerometer

Model: 393B05

Measuring Set-up

F Span: 200 Hz

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Averaging mode: Exponential, 40

Conclusion

All directions satisfy the vibration specification.

Measurement Data

Measuring Point	Status	Direction	Vibration specification	Measurement (P-P, µm)	Measurement (P-P, µm)	Measurement result	Measurement result
				Grating	DVIA-P4000	Grating	DVIA-P4000
Tier-1 semiconductor advanced institute Giheung, Building B, 1st floor. Cleanroom research laboratory. 1. Grating 2. DVIA-P4000	Turned on/IDLE	Vertical	8번 항목 참조	0.441 @ 1.13 Hz	0.083 @ 1.13 Hz	✗ FAIL	✓ PASS
		Left to Right	8번 항목 참조	0.179 @ 3.88 Hz	0.028 @ 3.88 Hz	✗ FAIL	✓ PASS
		Front to Back	8번 항목 참조	0.247 @ 1.06 Hz	0.077 @ 1.06 Hz	✗ FAIL	✓ PASS

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospecturm

Front to Back Transmissibility

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A