Vibration Isolation Case Studies

DVIA-ULF700 (serial 250902R6) retuning report: TESCAN CLARA FE-SEM in Beijing, China, end user NAURA Technology Group. 2nd tuning (1st 2025-12-10); tuning and report date 2026-04-13. Publishes vibration-specification diagram, tuning-request UI capture, nine-axis VC / autospectrum / transmissibility plots, RMS measurement summary with pass/fail, and markdown VC reference (EMF omitted).

DVIA-ULF700 (S/N 251224R5) active vibration isolation platform installation report for a ZEISS Sigma 360 FE-SEM at East China University of Science and Technology (Shanghai, China). Vibration specification and tuning-request program captures, nine-axis UI plots (VC, Autospectrum, Transmissibility), and equipment photographs. Floor measurements FAIL vs PASS on isolator per the report summary table.

Nanjing Hangpu (Nanjing City) ZEISS Sigma 360 DVIA-ULF700 installation report — retuning was performed to restore performance that had degraded, and vibration measurement verified the results. After retuning the Vertical axis passed on the DVIA-ULF700 (FAIL on floor), and Left-to-Right and Front-to-Back passed on both floor and platform. Per-axis Autospectrum data and an installation photo are published.

China Color Innovation Institute (Tianjin City, China) Thermo Fisher Scientific Apreo 2S SEM DVIA-ML1000 installation report — the active isolation platform meets the VC-F vibration specification on all axes (the floor fails on every axis; the DVIA-ML1000 platform passes vertical, left-to-right, and front-to-back). Per-axis VC Curves, Autospectrum, and Transmissibility plots, the vibration specification sheet, and the equipment photo are published.

DVIA-ML1000 installation report (serial 260110R1-2) for ZEISS FE-SEM Sigma 360 at Kunshan DeKaiYiTe. Tuning March 20, 2026; report April 7, 2026. Engineer Chaewon Lee (DAEIL SYSTEMS). Equipment condition per report: The equipment is turned on/IDLE. Measurement summary: floor FAIL vs platform PASS all axes; vibration specification per UI (item 9). Published: vibration specification capture, VC / Autospectrum / Transmissibility per axis, equipment photo. Reference is the standard Generic Vibration Criteria markdown table only.

Tier-1 Semiconductor Fabrication Facility Pyeongtaek P4 3F Line B05 Bruker NM-VI DVIA-P4000 Installation Report