Vibration Isolation Case Studies
DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.
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ZEISS FE-SEM Sigma 360 Shanxi Jingang Group DVIA-M1000 (250519R2) Installation Report
DVIA-M1000 installation report — ZEISS FE-SEM Sigma 360 (serial 250519R2) for Shanxi Jingang Group in Jincheng, China. Overview states the platform is appropriately installed and functioning as intended. Equipment condition: The equipment is installed/IDLE; Tuning request is supplied as UI capture. Measurement package on the published form: tuning-request screen capture; Transmissibility (vertical, left-to-right, front-to-back); equipment photo; Generic VC criteria Reference table.

Korea Institute of Science and Technology (KIST) TESCAN Clara FE-SEM DVIA-ULFB700 Installation Report — 2026.04.29
DVIA-ULFB700 (SN 260227R2) tuning and vibration measurement at KIST L0 Building room 184 for a TESCAN Clara FE-SEM. Engineer Chaewon Lee (DAEIL SYSTEMS field engineer); installation date April 28, 2026; tuning and measurements April 28, 2026; report written April 29, 2026. Equipment installed / Turned on/IDLE. Published VC, autospectrum, and transmissibility plots per axis plus an on-site equipment photo. The TESCAN slogan banner bitmap and Word 참고자료 EMF are omitted; Reference publishes the Generic Vibration Criteria as the standard markdown table only.

ZEISS Crossbeam 550L FIB-SEM DVIA-ML1000 (250806R3) Installation Report
DVIA-ML1000 installation report — ZEISS Crossbeam 550L FIB-SEM (serial 250806R3). Overview states the platform is appropriately installed and functioning as intended. Vibration-spec UI capture under Vibration specification; Prepared for / End User / Location N/A. Manufacturer line in the report form reads ZEIS. Equipment Condition Turned on/IDLE; Tuning Request N/A. UI-program Autospectrum and Transmissibility per axis. Equipment picture not published (report: Photo Not Allowed).

Gedeon Richter JEOL SEM JSM-IT500HR DVIA-ML1000 (250829R1) Installation Report
DVIA-ML1000 installation report — JEOL SEM model JSM-IT500HR (serial 250829R1) at Gedeon Richter Laboratory. Vibration specification is published as the UI capture under Vibration specification; End User N/A on the form. Equipment status and measurement summary (floor vs DVIA-ML1000) per the report; Conclusion notes floor vibration within specification on all axes after installation. VC curves, Autospectrum, and Transmissibility plots per axis from the measurement UI program.

Zhejiang Chuanghao Hitachi SU5000 FE-SEM DVIA-ULFB700 Installation Report
DVIA-ULFB700 (S/N 260112R4) active vibration isolation platform installation report at Yiwu, China. Hitachi SU5000 FE-SEM — tuning April 23, 2026. Vertical / Left-to-Right / Front-to-Back VC Curves, Autospectrum, and Transmissibility on the DVIA-ULFB700 with equipment turned on/IDLE; tuning request UI capture, vibration specification table, and equipment photos.

Qingdao Aviation Innovation Base QIYUE TECHNOLOGY SEM660F FIB-SEM DVIA-ML1000 Installation Report
QIYUE TECHNOLOGY SEM660F FIB-SEM at Qingdao Aviation Technology Industry Innovation Base (Qingdao, China), channel — DVIA-ML1000 installation report for the 3rd tuning trial, tuned 2026-04-20 with the equipment turned on/IDLE. The floor reached VC-E at 31.5 Hz vertically and VC-G left to right and front to back, while the DVIA-ML1000 platform held VC-G on all three axes. The engineer also noted that a cooling fan mounted beneath the equipment blows directly onto the platform and affects its performance. Per-axis VC Curves, Autospectrum and Transmissibility plots from the UI program are published together with the on-site equipment photo.