WONIK IPS DVIA-T78 (211213R1) Installation Report

Engineer: Chaewon Lee

April 29, 2026

May 4, 2026

Inspection was performed on the DVIA-T78 installed in the 4F wafer analysis lab at the WONIK IPS Jinwi site.

Inspection and vibration measurements were conducted with the equipment in a Turned on/IDLE state.

Data are presented as VC curves, and Reference materials are provided for the vibration levels.

Model: DVIA-T78

Serial number: 211213R1

Chaewon Lee from DAEIL SYSTEMS, field engineer

April 29, 2026

WONIK IPS Jinwi site, 4F wafer analysis lab

WONIK IPS

Manufacturer: Bruker

Equipment: Nano Indentation tester

Model: TS77

N/A

Equipment installed / Turned on/IDLE

1) Data Physics DAQ

Hardware: QUATTRO, Serial Number: 22436

Software: SignalCalc ACE

2) Accelerometer

PCB Accelerometer

Model: 393B05

F Span: 200 Hz

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Averaging mode: Exponential, 40

On-site inspection results showed that the DVIA-T78 isolator delivered very good overall performance. In all directions it demonstrated more than 90% isolation performance above 2 Hz, confirming that the isolator itself was operating normally.

Together with the Bruker engineer, we examined changes in floor vibration and isolator-top vibration at the moments when image noise appeared on the TS77 tool. The measurements showed that, at the times when image noise occurred, both floor vibration and DVIA-T78 top vibration increased in the 1–10 Hz band compared with steady-state conditions.

Even at those moments, the DVIA-T78 attenuated VC-B/C-class floor vibration toward VC-D/E on the top surface, which means the isolator was still performing its isolation function normally.

Therefore, the main cause of TS77 image noise is judged not to be isolator performance degradation, but an increase in building vibration that raised the isolator-top level together with the floor. In other words, although the isolator substantially attenuated floor vibration, when building vibration itself rises the top vibration can still increase relatively and affect image quality.

For stable operation and reduced image noise, we recommend relocating the equipment to a location with lower and more stable floor vibration than the current installation site.