Installation Report

DVIA-T Series

06-19-2026

Hyundai Motor Keyence Laser Confocal Microscope VK-3000 DVIA-TD45 Installation Report

DVIA-T Series

Installation Report

Hyundai Motor

Keyence

Laser Confocal Microscope

VK-3000

DVIA-TD45

260422R5

Overview

Inspection background: When the isolation system was active, vibration occurred in the high-magnification measurement range, while the vibration decreased when it was inactive.

Field situation and root-cause analysis: On-site equipment inspection confirmed oscillation of the vibration isolation system.

After re-tuning, the customer equipment requirements were satisfied and normal operation of the high-magnification microscope was confirmed.

The influence of airflow from the ventilation duct around the equipment was additionally checked.

The measured data are presented as VC Curves, and reference vibration-level criteria are provided.

Vibration Isolation System Information

Model: DVIA-TD45

Serial Number: 20260422R5

Engineer

Seongyun Jeong, DAEIL SYSTEMS

Tuning Date

June 8, 2026

Installation Site

Hyundai Motor Environmental Technology Research Center

End User

Hyundai Motor

Customer Equipment

Manufacturer: Keyence Korea

Equipment: Laser Confocal Microscope

Model: VK-3000

Vibration Specification

VC-C

Equipment Status

Vibration measurement was performed with the customer equipment in operation after installation. The exhaust from the ventilation duct on the left adversely affects the measurement, so relocating the ventilation duct is recommended.

Figure 1. Influence of the ventilation duct on the left side of the equipment

Measuring Equipment

Measurement Equipment

- Hardware: B&K Type 3050-A-040

- Software: PULSE 22

Accelerometer: PCB 393B05

Measuring Set-up

F Span: 200 Hz

Lines: 2400

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Measurement Summary

Measurement Point	Status	Vibration Specification	Axis	Floor	DVIA-TD45
1. Floor 2. DVIA-TD45	In operation	VC-C	Vertical	✓ PASS	✓ PASS
			Left to Right	✗ FAIL	✓ PASS
			Front to Back	✓ PASS	✓ PASS

Data and Image

Vertical VC Curves

Left to Right VC Curves

Front to Back VC Curves

Reference

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

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