Installation Report

DVIA-P Series

01-15-2026

ETRI Hitachi CS5000 DVIA-P4000 Installation Report

DVIA-P Series

Installation Report

ETRI

Hitachi

CS5000

Overview

Tuning and vibration measurement were performed on the DVIA-P4000 installed at ETRI Building 4 G Floor Semiconductor Equipment Room.

Tuning and vibration measurement were conducted with the equipment Turned off.

Data are presented as VC Curves, along with reference materials for vibration level assessment.

Vibration Isolation System Information

Model: DVIA-P4000

Serial Number: 251105R3

Engineer

Chaewon Lee from DAEIL SYSTEMS

Measurement Date

January 14, 2026

Installation Site

ETRI Building 4, G Floor Semiconductor Equipment Room

End User

ETRI (Electronics and Telecommunications Research Institute)

Equipment Information

Manufacturer: Hitachi

Equipment: FEB CD Measurment SEM

Model: CS5000

Equipment Specifications

Equipment Status

Equipment is installed / Turned off

Measuring Equipment

10.1) Data Physics DAQ

Hardware: QUATTRO, Serial Number: 22436

Software: SignalCalc ACE

10.2) Accelerometer

PCB Accelerometer

Model: 393B05

Measuring Set-up

F Span: 200 Hz

Lines: 3200

Engineering Units: m/s

Window: Hanning

Averaging: FFT Spectrum Averaging

Averaging mode: Exponential, 40

Conclusion

Meets vibration specifications in all directions.

Measurement Data

Measuring Point	Status	Direction	Spec	Measurement Data		Result
Measuring Point	Status	Direction	Spec	Floor	DVIA-P4000	Floor	DVIA-P4000
ETRI Building 4 G Floor Semiconductor Equipment Room 1. Floor Vibration 2. DVIA-P4000	Turned off	Vertical	N/A	VC-C @ 31.5 Hz	VC-E @ 31.5 Hz	✓ PASS	✓ PASS
		Left to Right	N/A	VC-C @ 31.5 Hz	VC-E @ 31.5 Hz	✓ PASS	✓ PASS
		Front to Back	N/A	VC-C @ 63 Hz	VC-G @ 63 Hz	✓ PASS	✓ PASS

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospecturm

Front to Back Transmissibility

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

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