Vibration Isolation Case Studies

DVIA-UB700 (S/N 221024R5) inspection report for ZEISS FE-SEM Sigma 300 at Hanyang University, Natural Sciences Building, Room 112. Turned on/IDLE measurements: vertical, left-to-right, and front-to-back VC curves, autospectra, and transmissibility. LPF tuning on left-to-right and front-to-back removed initial active-mode oscillation; all directions meet vibration specification at pass levels shown in the measurement summary.

DVIA-ML1000 installation report (serial 241104R1).

DVIA-ML1000 installation report (serial 250331R2) for Unisoku STM — 3rd tuning on January 7, 2026 after oscillation and re-tuning. Engineer Chaewon Lee (DAEIL SYSTEMS). End User and Location N/A on the form; equipment model field N/A. Vibration Specification N/A; equipment condition The equipment is turned on/IDLE; Tuning Request N/A. Published UI-program autospectra and transmissibility (vertical, left-to-right, front-to-back) and equipment photo. No measurement summary table or VC curves on the form. Reference uses the standard Generic Vibration Criteria markdown table only.

DVIA-ML1000 installation report — ZEISS Crossbeam 350 FIB-SEM (serial 250806R2). Overview states the platform is appropriately installed and functioning as intended. Vibration-spec UI capture under Vibration Specification; Prepared for / End User / Location N/A. Manufacturer line in the report form reads ZEIS. Equipment Condition Turned on/IDLE; Tuning Request N/A. UI-program Autospectrum and Transmissibility per axis and equipment photo.

DVIA-ML1000 installation report — Ciqtek SEM5000X (251113R6). The active vibration isolation platform is appropriately installed and functioning as intended. Measurements with SEM5000X Turned on / IDLE; vibration specification N/A on the form; measurement summary compares floor vs on DVIA-ML1000 at dominant frequencies. UI-program plots and equipment photo.

DVIA-ULF1000 (S/N 250813R2) at Huasheng Lianying Vibration Damping Platform, Wuxi (YIDONG FE-SEM YF-1801). Tuning 2025-12-29; report written 2026-01-07; 7th trial. Overview and measurement plots from the YIMO Installation Report DOCX (WebP). Decorative header image and Reference EMF omitted per site rules (Reference uses the standard VC markdown table only).