Case Studies
DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.
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All Case Studies

Saeron Technology UB1000 P3 demo result — in-house SEM vibration survey (2016-10-21)
Demo report dated 21 October 2016 for UB1000 P3 at Saeron Technology in Uiwang, Gyeonggi-do, comparing on-site vibration and 100,000× SEM imaging against the existing MB1000 platform on an in-house SEM. Travelers CHOI HYOUNGMUN and LIM JONG UK; measurer LIM JONG UK. Publication includes the in-house SEM photograph, floor versus platform VC-class Z/X/Y plots, and ACTIVE image-comparison captures for MB1000 and UB1000. Decorative header PNG omitted.

Tier-1 Display Manufacturer Giheung MB1000_P30 TESCAN MIRA3 AMU Vibration Environment Measurement Report (2016-10-12)
MB1000_P30 passive vibration isolation setup at Tier-1 Display Manufacturer Giheung with TESCAN MIRA3 AMU as the target tool: September 28, 2016 floor (BASE) versus platform top (TOP) VC-class summary and Z/X/Y VC curves.

Tier-1 Electronics Component Manufacturer Cheonan — Hitachi SEM SU8010 vibration environment measurement (MB1000_P34) — 2016-10-06
2016 vibration survey after MB1000_P34 installation at Tier-1 Electronics Component Manufacturer Cheonan for a Hitachi SU8010 SEM: VC-Class summary for floor versus isolation-platform top surface, plus Z/X/Y VC-Class graphs.

HITACHI SEM SU3500 DVIA-MB1000 program P29 — Kyungsan Tyco AMP vibration survey (2016-09)
MB1000 internal program survey (P29) recorded at Kyungsan Tyco AMP for a Hitachi SEM SU3500 after isolation platform installation. Trip 2016-09-06; report authored 2016-09-07 (DAEIL SYSTEMS: Kim Du-hyun, Lim Jong-wook). Published imagery: SEM context raster under the Target equipment caption, VC-Class environment curves for Z / X / Y, and internal-program transmissibility plots for three axes — plus the measurement-result summary extracted from the handout.

DVIA-U type (UB1000) Installation Test Report — Reporting 2016.09.02
Archived DVIA-U type UB1000 installation test summary (installation and measurement 2016.08.31; reporting 2016.09.02; engineer LIM JONG UK, DAEIL SYSTEMS). Source worksheet lists VC-class results for active Z/X/Y on base and top and includes internal-program transmissibility plots (Result 1) plus PULSE 1/3 octave band plots (Result 2). No customer or installation site is named in the worksheet.

UB1000 P2 Chengdu China Business Trip Report — Zeiss EVO 18 SEM (2016-09-02)
UB1000_P2 setup business trip to Chengdu, China (30 Aug–1 Sep 2016) for Zeiss EVO 18 SEM. Engineers CHOI HYOUNGMUN and LIM JONG UK; report written 2016-09-02. Publication includes the equipment setup photograph, passive spring comparison diagram, internal-program Z (PASSIVE/ACTIVE) and X/Y ACTIVE plots, floor vibration-environment Z/X/Y plots, and SEM ON/OFF comparison plots (OFF captures only; ON reuses ACTIVE transmissibility plots from Attachment 1). Decorative header PNG omitted.