Installation Report

DVIA-M Series

06-02-2017

ZEISS Gemini FE-SEM DVIA-MB1000 Installation Report

DVIA-M Series

Installation Report

ZEISS

1. Measurement Details

Measurement Date

June 2, 2017

Measurement Devices

1. LAN-XI Data Acquisition Hardware

– Brüel & Kjæ r 3050-B-040

2. Data Analysis Software

– Brüel & Kjæ r PULSE LAB SHOP 14

3. Sensors

– PCB Accelerometer

– Model: 393B05

Measurement Location

Floor

2. Equipment Information

Manufacturer

ZEISS

Model

Gemini FE-SEM

Floor Vibration Specification

VC-E in Vertical and Horizontal Axis

3. Vibration Isolation System Information

Model: DVIA-MB1000

Platform Dimensions		1140 x 910 x 224 mm
Load Capacity	500 - 1700 kg
Actuator	Electromagnetic Actuator
Maximum Actuator Force	Vertical: 40N, Horizontal: 20 N
Degrees of Freedom	6 degrees
Active Isolation Range	0.5 - 100 Hz
Vibration Isolation at 2 Hz	≥90%
Vibration Isolation at 10 Hz	≥99%
Input Voltage (V)	AC100 - 240V / 50 - 60 Hz / 1A
Power Consumption (W)	Maximum 110W, <50 W in normal operation
Operating Range	Temperature (°C)	5 - 50 °C
Humidity (%)	20 - 90%
Required Air Pressure	≥ 0.5 MPa (5 bar)

4. Installation Photo

5. Summary

Vibration Criterion Curves

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Frequency Range		1-10 Hz		10 - 80 Hz
Measurement Direction	Z axis (Vertical)	X axis (Left to Right)	Y axis (Front to Back)	Z axis (Vertical)	X axis (Left to Right)
Floor	VC-D (✗ Fail)	VC-D (✗ Fail)	VC-D (✗ Fail)	VC-B (✗ Fail)	VC-B (✗ Fail)
On Active Vibration Isolation System	VC-G (✓ Pass)	VC-G (✓ Pass)	VC-G (✓ Pass)	VC-G (✓ Pass)	VC-G (✓ Pass)

6. Results

Z-axis (Vertical)

X-axis (Left to Right)

Y-axis (Front to Back)

7. Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude µm/s (µin/s)	Detail Size µm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

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