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Vibration Isolation Case Studies

DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.

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1246 case studies
Tier-1 Semiconductor TESCAN-FE SEM DVIA-MB1000 (MB1000 program) Installation Report — 2020.06.29

DVIA-MB1000 MB1000 program handout for a TESCAN-FE SEM site at a Tier-1 Semiconductor Busan floor-4 location. Setup metadata, measurement chain photos, summary VC-class table, MB1000 internal-program transmissibility and coherence plots per axis, and octave-band floor vs above-active comparisons against VC limits. Standard Generic Vibration Criteria are published as the site markdown table only (Korean criteria raster and VC nomograph from the Word appendix are not uploaded). Field engineer Choi, Hyoung Mun (DAEIL SYSTEMS); measurement 2020-06-23; report 2020-06-29.

KIST ZIESS-EXAMINER.A1 UD350 P7 Installation Report (June 2020)
Installation Report
DVIA-ULF Series
06-25-2020

KIST ZIESS-EXAMINER.A1 UD350 P7 Installation Report (June 2020)

UD350 P7 performance worksheet for KIST (L7 building 2nd floor): ZIESS-EXAMINER.A1, setup June 24, 2020 and reported June 25, 2020 by Hyoung Mun Choi (DAEIL SYSTEMS). B&K PULSE 14 / LAN-XI Type 3056 and PCB 393B05 accelerometer (0.7–200 Hz). VC-Class summary (Floor vs Above Active) and UD350 internal-program Z/X/Y screenshots plus octave-band Floor vs Above Active plots. Decorative title-block raster (image1) and inline summary-table embeds (image2–4) omitted from publication.

Hitachi Regulus a220 DVIA-ML3000 — MB1000 program P158 / 191211R2 (report 2020-06-23)

DVIA-ML3000 platform (serial 191211R2) with Hitachi Regulus a220 per the MB1000 program handout P158: onsite measurement 2020-06-19, report 2020-06-23. VC-Class summary cells are blank in the source form; Good omnidirectional performance statement; published imagery is the installation photograph plus MB1000 internal-program Z, X, and Y plots.

ZEISS Crossbeam 550 DVIA-MB1000 (MB1000 P145 / 191022R1) Internal Program — Singapore IME — 2020.06.19

Nanoserv project file MB1000 P145: MB1000 internal-program worksheet (title block MB1000_191022R1) for ZEISS Crossbeam 550 at Singapore IME Level 1. Setup on 2020-06-19, report dated 2020-06-23, measurement by Manager Doohyun, Kim (Daeil System). Publishes the site photograph after the title block, the VC-Class summary table as issued (Floor and Above Active with empty VC-Class cells), and MB1000 program screenshots under the Z, X, and Y axis headings in the same order as the source DOCX.

Tier-1 Semiconductor TESCAN-FE SEM DVIA-MB1000 (MB1000 program, P123) Installation Report — 2020.06.19

DVIA-MB1000 MB1000 program handout for a TESCAN-FE SEM site at a Tier-1 Semiconductor Icheon R&D Center 1F location (program P123). Setup metadata, measurement chain photos, VC-class summary table, MB1000 internal-program plots per axis, and octave-band floor vs above-active plots. Generic Vibration Criteria are published as the site markdown table only (Korean criteria raster and VC nomograph from the Word appendix are not uploaded). Field engineer Choi, Hyoung Mun (DAEIL SYSTEMS); measurement and report 2020-06-19.

TESCAN AMBER DVIA-MB1000 (P161) Internal Program Performance — 2020.06.17

DVIA-MB1000 program MB1000 P161 — target equipment TESCAN AMBER (isolator tag MB1000_200306R1 in the worksheet). End user and installation site fields are N/A in the source form. Internal-program plots follow Z axis, X axis, and Y axis as embedded under those headings; the centered graphic under the setup title is not republished.