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DAEIL SYSTEMS

DAEIL SYSTEMS

Thermo Fisher
Installation MB3000 – TFS Glacios 2

Active Vibration Isolation Systems

Installation Reports

Thermo Fisher Scientific

Vibration Isolation MB 3000 - Glacios 2

• Executive Summary

Introduction

The purpose of this work is to install the Vibration Isolation MB 3000 system for the Thermo Fisher Scientific Glacios 2 at Pfizer. Thermo Fisher Scientific hired VEC to install the Daeil MB-3000 vibration isolation platform and provide a report of the completed work.

Summary Results

Below is a summary of the results:

  • MB3000 ON PASSED the Vibration specifications

• Introduction

The purpose of this work is to install the Vibration Isolation MB 3000 system for the Thermo
Fisher Scientific Glacios 2 at Pfizer. Thermo Fisher Scientific hired VEC to install the Daeil MB-
3000 vibration isolation platform and provide a report of the completed work.

• Product Details

Part Delivered Serial Number Software
MB3000 230518R1 Site-Specific Tune

• Summary of Work

We installed the system by

  • Positioning the Daeil under the microscope

 

We tested the system by

  • Creating and uploading a site specific tune
  • Collecting vibration data to verify the performance

 

We left the system

  • In position and on

• Procedures

Vibration

VEC conducted vibration measurements in six directions. Acceleration measurements were taken at a bandwidth of 200 with units of um/s (RMS). The acceleration spectra with 200 bandwidths were recorded.

• Setup

Vibration
Bandwidth 200
Lines 1600
Window Hanning
Coupling ICP 2mA
Average Type Stable
Duration 60
Engineering Units um/s (RMS)

• Specifications

VEC used the following specifications for the project.

Specification Summary

Tool Specification
Thermo Fisher Scientific Glacios 2 Vibration
 VC-F
  X & Y
   1.56 um/s 1Hz - 100Hz
 VC-E
  Z
   3.12 um/s 1Hz - 100Hz

Detailed Specifications

Figure 1: Thermo Fisher Scientific Glacios 2 – 1 Vibration Specification

System Vertical Left to right Front to back
Glacios; TEM info Limit 0.23 nm E F F
Glacios; STEM res. 0.23 nm E F F

• Results

Summary Results

Below is a summary of the results:

  • MB3000 PASSED the Vibration specifications
 

Detailed Results

Type Position Direction Specification Measurement Result
Vibration Floor X-Axis VC-F VC-G PASS
Y-Axis VC-G PASS
Z-Axis VC-E VC-D PASS
Isolators X-Axis VC-F VC-G PASS
Y-Axis VC-G PASS
Z-Axis VC-E VC-G PASS

• Data

Thermo Fisher Scientific Glacios 2

Vibration

Figure 2: Ground X-Axis

Specification: VC-F; Measurement: VC-G; Result: PASS

Figure 3: Isolators X Axis

Specification: VC-F; Measurement: VC-G; Result: PASS

Figure 4: Transmissibility X Axis

Figure 5: Ground Y-Axis

Specification: VC-F; Measurement: VC-G; Result: PASS

Figure 6: Isolators Y Axis

Specification: VC-F; Measurement: VC-G; Result: PASS

Figure 7: Transmissibility Y Axis

Figure 8: Ground Z-Axis

Specification: VC-E; Measurement: VC-D; Result: FAIL

Figure 9: Isolators Z Axis

Specification: VC-E; Measurement: VC-G; Result: PASS

Figure 10: Transmissibility Z Axis

Figure 11: Final Results – SN