DAEIL SYSTEMS

DAEIL SYSTEMS

DVIF Series
Vibration Isolated Foundation

  • Overview
 

DVIF

Advanced, sophisticated equipment in semiconductor fabrication plants have strict enivronmental requirements
that must be met to avoid any degradations in system throughput or overlay performance.
Therefore, the semicondudctor equipment must be installed on a vibration isolated foundation platform,
which is separated from access floors causing significant vibrations.

 

Configuration of Vibration Isolated Foundation

 

DVIF-Configuration-of-Vibration-Isolated-Foundation

 

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