DAEIL SYSTEMS

DAEIL SYSTEMS

DVIM-M Series
Standard Pneumatic Vibration Isolator

  • Overview
  • Features
  • Performance
  • Specifications
  • Options
  • Order
  • Resources
 

The DVIM-M series is a standard pneumatic vibration isolator, intergrated with a built-in damping system as to
minimize its size and offer a fast settling time.

 
 

Dual Chamber Design
for Highest Damping Level

The dual chamber system of the DVIM-M series consists of an air chamber and a damping chamber connected by two
orificies : variable orifice and internal orifice. The variable orifice located outisde of the chambers and the internal
orifice located inside the chambers. These orificies control air flow between the chamberes to increase damping
efficiency and reduces its settling time. As the high forces of stage accelaration occur,
the air chamber makes a restoring force and air flows into the damping chamber through
the orifices. These orifices dissipate energy in the air, effectively damping the system.

 

High Performance Leveling Valve

The standard leveling vales with repeatability of ±0.1 mm and the precision leveling valves with repeatability of ±0.05 mm.
The precision leveling valves are recommended if both the releveling accuracy and the settling time are required.

 

Built-in Oil Damper to Support Metrology Equipment with Linear Stage

The built-in oil dampers are integrated in the DVIM-M series, dampening and minimizing disturbances caused by the linear
stage motions. Unfortuantely, there is a trade-off between the resonant frequency and damping efficiency. As damping is
increased, the fast settling time is acheived however, the resonant frequency of the DVIM-M isolators shift slightly higher
and the efficiencyof vibration isolation performance is decreased.

 

80 – 90% vibration isolation at 10 Hz
(Without Damper)

DVIM_M_Performance
Vibration Isolation System Pneumatic Isolation System
Load Capacity 100–60000 kg
Resonant Frequency 2.5–4.0 Hz
Vibration Isolation at 10 Hz 80–90% (Without Oil Damper)
Automatic Leveling Yes
Accuracy of Leveling Repeatability ±1.0 mm for Standard Leveling Valve
±0.05 mm for Precision Leveling Valve

Built-In Oil Damper
Better Stability & Faster Settling Time

The built-in oil damper option is installed with stoppers to limit the linear stage from moving beyond certain stroke range
in the three horizontal directions. The built-in oil damper option provide high level of damping by an oil inside the dampers.
The higher the visocosity of the oil, the stiffer pneumatic vibration isolators which leads to shorten the settling time and
increases the stability of the systembut the transmissibility roll-off rate decreases.

Model Dimensions (Floating)
L x W x H (mm)
Dimensions (Deflated)
L x W x H (mm)
Location of Bolt Hole
P x P (mm)
Weight Per Isolator
(kg)
Maximum Load Capacity
Per Isolator (kg)
Diameter of Bolt Hole
(⌀)
DVIM-M-100 180 x 180 x 150 180 x 180 x 144 160 x 160 11 100 10
DVIM-M-300 200 x 200 x 150 200 x 200 x 144 180 x 180 16 300 10
DVIM-M-600 240 x 240 x 170 240 x 240 x 164 210 x 210 20 600 10
DVIM-M-900 270 x 270 x 190 270 x 270 x 184 240 x 240 35 900 14
DVIM-M-1200 290 x 290 x 190 290 x 290 x 184 260 x 260 43 1200 14
DVIM-M-1500 320 x 320 x 190 320 x 320 x 184 290 x 290 50 1500 14
DVIM-M-2000 370 x 370 x 190 370 x 370 x 184 340 x 340 56 2000 18
DVIM-M-2500 390 x 390 x 190 390 x 390 x 184 360 x 360 63 2500 18
DVIM-M-3000 440 x 440 x 190 440 x 440 x 184 410 x 410 80 3000 18
DVIM-M-4500 450 x 450 x 190 450 x 450 x 184 420 x 420 85 4500 18
"D" indicates DVIM-M isolators with built-in oil dampers.
Model Dimensions (Floating)
L x W x H (mm)
Dimensions (Deflated)
L x W x H (mm)
Location of Bolt Hole
P x P (mm)
Weight Per Isolator
(kg)
Maximum Load Capacity
Per Isolator (kg)
Diameter of Bolt Hole
(⌀)
DVIM-M-100D 180 x 180 x 150 180 x 180 x 144 160 x 160 11 100 10
DVIM-M-300D 200 x 200 x 150 200 x 200 x 144 180 x 180 16 300 10
DVIM-M-600D 240 x 240 x 170 240 x 240 x 164 210 x 210 20 600 10
DVIM-M-900D 270 x 270 x 190 270 x 270 x 184 240 x 240 35 900 14
DVIM-M-1200D 290 x 290 x 190 290 x 290 x 184 260 x 260 43 1200 14
DVIM-M-1500D 320 x 320 x 190 320 x 320 x 184 290 x 290 50 1500 14
DVIM-M-2000D 370 x 370 x 190 370 x 370 x 184 340 x 340 56 2000 18
DVIM-M-2500D 390 x 390 x 190 390 x 390 x 184 360 x 360 63 2500 18
DVIM-M-3000D 440 x 440 x 190 440 x 440 x 184 410 x 410 80 3000 18
DVIM-M-4500D 450 x 450 x 190 450 x 450 x 184 420 x 420 85 4500 18
DVIM_M_Series_Order

2D CAD

Ready to get started?