Built-In Active Vibration Isolation System

DVIA-M Series

Nanoscale Imaging Without Noise

  • Overview
  • Features
  • Performance
  • Specifications
  • Applications
  • Resources

The DVIA-M is the most advanced built-in active vibration isolation system in the world, incorporated in various platforms and used as a built-in active vibration isolation system inside electron microscopes.


Sub-Hertz Vibration Isolation Performance

The most sophisticated active vibration control algorithms are embedded in the DVIA-M series,
delivering 50% - 80% vibration isolation at 1 Hz and and 90% vibration isolation at 2 Hz in six degrees of freedom.


Built-In Active Vibration Isolation System

The DVIA-M active vibration isolators are designed as a built-in active vibration isolation system for nanoscale imaging equipment such as electron microscopes.


Feedback & Feedfoward Control Algorithm

The DVIA series uses the Feedback control algorithm to continuously detect vibrations disturbing an isolated
surface and instantaneously react to minimize the vibrations in real-time. The Feed-Forward control algorithm
is employed in the DVIA Series to filter out floor vibrations in advance before the floor vibrations can be
transmitted to equipment installed on the active vibration isolation systems.

Feedback & Feedfoward <br />Control Algorithm

Active Vibration Isolation in All Six Degrees of Freedom

The DVIA Series controls vibrations in three translational degrees of motions ( X, Y and Z) and three rotational degrees of motions ( pitch, roll and yaw).


50% - 80% vibration isolation at 1 Hz
≥90% vibration isolation at ≥2 Hz

Model DVIA-M1000 DVIA-M3000 DVIA-M6000
Isolator Dimensions (L x W x H) 190 x 190 x 178 mm 232 x 232 x 180 mm 308 x 308 x 180 mm
Load Capacity 500 - 1700 kg 1500 - 3500 kg 3000 - 6000 kg
Actuator Electromagnetic Actuator
Maximum Actuator Force Vertical: 40 N, Horizontal: 20 N Vertical: 80 N, Horizontal: 40 N
Degrees of Freedom 6 degrees
Active Isolation Range 0.5 - 100 Hz
Vibration Isolation at 1 Hz 50% - 80%
Vibration Isolation at ≥2 Hz ≥ 90%
Input Voltage (V) AC100 - 240V / 50 - 60 Hz / 1A
Power Consumption (W) Maximum 110W, <50 W in normal operation
Operating Range Temperature (°C) 5 - 50 °C
Humidity (%) 20 - 90%
Required Air Pressure ≥ 0.5 MPa (5 bar)

Scanning Electron Microscopy

Transmission Electron Microscopy

Scanning Transmission Electron Microscopy

Scanning Tunneling Electron Microscopy




Ready to get started?