DAEIL SYSTEMS

DAEIL SYSTEMS

DVIA-UB Series
LOW-PROFILE SEM BASE PLATFORM

ce-mark
mark-NRTL_1
  • Overview
  • Features
  • Performance
  • Specifications
  • Applications
  • Resources
 

The DVIA-UB is a low-profile active vibration isolation platform with the integrated DVIA-U active vibration isolators, designed to isolate Scanning Electron Microscopes from low-frequency floor vibrations.

 
 

Low-Frequency Vibration Isolation

The advanced active vibration control algorithms are embedded in the DVIA-UB series,
delivering ≥90% vibration isolation at ≥4 Hz.

 

LOW-PROFILE ACTIVE VIBRATION
ISOLATION PLATFORM

The DVIA-UB is a low-profile base active vibration isolation platform,
the optimal vibration solution for equipment with a limited space.

 

EASY INSTALLAION

The passive mechanism of the DVIA-UB is simple that it does not require our engineers to visit the site and setup the active isolation system. Users can setup the system by simply following the user manual.

 

No Air

All the DVIA-UB requires eletricity to operate.

 

UI Software for Users

We take pride in our work to provide a vibration isolation system that actually reduce floor vibrations.
The UI software is provided along with the DVIA-U series for users to monitor the real-time active
vibration isolation performance and floor vibration levels.

 
 

Feedback & Feedfoward Control Algorithm

The DVIA series uses the Feedback control algorithm to continuously detect vibrations disturbing an isolated
surface and instantaneously react to minimize the vibrations in real-time. The Feed-Forward control algorithm
is employed in the DVIA Series to filter out floor vibrations in advance before the floor vibrations can be
transmitted to equipment installed on the active vibration isolation systems.

Feedback & Feedfoward <br />Control Algorithm
 

Active Vibration Isolation in All Six Degrees of Freedom

The DVIA Series controls vibrations in three translational degrees of motions ( X, Y and Z) and three rotational degrees of motions ( pitch, roll and yaw).

DVIA-M-Absolute-Control-of-Vibrations-in-All-Six-Degrees-of-Freedom
 
 
 

≥90% Vibration Isolation at ≥4 Hz.

 
DVIA-UB-Performance
 
 
Model DVIA-UB350 DVIA-UB700
Platform Dimensions (L x W x H) Custom-made Custom-made
Maximum Load Capacity 350 kg 700 kg
Actuator Electromagnetic Actuator
Maximum Actuator Force Vertical: 6 N, Horizontal: 3 N Vertical: 12 N, Horizontal: 6 N
Degrees of Freedom 6 degrees
Active Isolation Range 0.5 - 100 Hz
Vibration Isolation ≥4 Hz. ≥90%
Input Voltage (V) AC100 - 240V / 50 - 60 Hz / 1A
Power Consumption (W) Maximum 110W, <50 W in normal operation
Operating Range Temperature (°C) 5 - 50 °C
Humidity (%) 20 - 90%
 
 

Scanning Electron Microscopy

 
ZEISS SEM Sigma 500

ZEISS SEM Sigma 500

ZEISS SEM EVO 18

ZEISS SEM EVO 18

ZEISS SEM EVO 15

ZEISS SEM EVO 15

 

Ready to get started?