Active Vibration Isolation Systems - Case Studies

Active Vibration Isolation Systems

PARK SYSTEM XE-100-01 AFM

Pneumatic Vibration Isolation Table Set point : 502.34 (nN)

Active Vibration Isolation Table(DVIA-T45) Set point : 563.25 (nN)

The line profile indicates that the nosie of the pneumatic vibration isolation tables is 10 times greater than the active vibration isolation table and the cause of exccessive noise of the XE-100-02 due to the vibration isolation performance difference between the pneumatic vibration isolation table and the active vibration isolation table. The AFM XE-100-01 confirms that it is possible to measure fine samples of the XE-100-02 with DAEIL SYSTEMS's tabletop active vibration isolation platform.

AFM

Active Vibration Isolation OFF

Active Vibration Isolation ON

Active Vibration Isolation OFF

Active Vibration Isolation ON

AFM SILCON CANTILEVER IMAGING

Analysis - frequency

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Analysis - Standard Deviation

Imaging TEST in Different Substrate (Silicon Cantilever)

HOLOGRAPHINC MICROSCOPE

TOMOCUBE 3D HOLOGRAPHIC MICROSCOPE installed on DVIA-T56

Without active vibration isolation

With active vibration isolation

50nm RESOLUTION MICROSCOPE

50 nm lateral resolution MICROSCOPE installed on DVIA-T56

Passive vibration isolation

Active vibration isolation

Passive Vibration Isolation Mode

Active Vibration Isolation Mode

LIVE CELL IMAGING MICROSCOPE

NIKON DS-Qi2 + OLYMPUS U-CMAD3 + U-TV1X-2(LIVE CELL IMAGING MICROSCOPE installed on THE CUSTOM DVIA-UD 350 (Desk Active Vibration Isolation Platform)

cell imaging

Active vibration isolation mode is turned on at 00:14

JEOL Tabletop SEM

Service Report Number:	NSR-0063-DAE-JEOL-20210202
Date of Service:	2nd February 2021

Customer Information

Customer Organization :	JEOL Asia Pte Ltd
End-user Contact :	Mr. Patrick Lim
Address :	2 Corporation Rd, #01-12 Lobby A of Corporation Place Singapore 618494

System Information

System / Model :	DAEIL DVIA-T56 Active Vibration Isolation Platform (Benchtop)
System Serial Number :	210112R11
Service Type :	Installation for JEOL JCM-7000 Tabletop SEM
System Status :	Demo

Job Summary

Un-crate the platform and checks all parts for the active vibration isolation platform. Complete delivery without missing part/component.
Positioned the DVIA-T56 under the JEOL JCM-7000 Tabletop SEM.
Powered up the DVIA-T56 and performed auto load adjustment.
Turned on isolation for the DVIA-T56.
Performed remote tuning by DAEIL engineer for optimum performance.
Performed vibration measurements on the table and base plate of the platform.
Please refer to appendix A for the vibration plots for XYZ.
Please refer to appendix B for the system images.
Please refer to appendix C for the Gold on carbon images at 50kX and 100kX.